......DE........................................................................JDIM360 (Ver 1.5 21 Nov 2005) - 2999001/01026499CORRECTED EUROPEAN PATENT SPECIFICATIONB8B120060301W184deBibliographieenBibliographyfrBibliographieEP99117412.9199909072000101020030509enenen279199919990204JP2006030120060920000809200032200512072005492005061520060301200609G01N 21/88 19800101AFI19991022BHEP deInspektionssystemenInspection systemfrSystème d'inspectionEP-A- 0 159 364WO-A-98/22909GB-A- 2 238 1511Inagaki, Daisuke, c/o Keyence Corporation1-3-14 Higashinakajima, Higashiyodogawa-kuOsaka-shi, Osaka 533-8555JPIkushima, Yasuhisa, c/o Keyence Corporation1-3-14 Higashinakajima, Higashiyodogawa-kuOsaka-shi, Osaka 533-8555JPKeyence Corporation0116421379 109 a/aw1-3-14, Higashinakajima, Higashiyodogawa-kuOsaka-shi, Osaka 533-8555JPHOFFMANN EITLE00101511Patent- und Rechtsanwälte Arabellastrasse 481925 MünchenDEDE