(19)
(11) EP 1 026 920 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
10.04.2002 Bulletin 2002/15

(43) Date of publication A2:
09.08.2000 Bulletin 2000/32

(21) Application number: 00300768.9

(22) Date of filing: 01.02.2000
(51) International Patent Classification (IPC)7H05B 3/14
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 02.02.1999 JP 4278099

(71) Applicant: JAPAN ENERGY CORPORATION
Minato-ku, Tokyo (JP)

(72) Inventors:
  • Takagaki, Daisuke, C/o Isohara Plant of Nikko Mat.
    Kitaibaraki-shi, Ibaraki-Ken, 319-1535 (JP)
  • Takamura, Hiroshi, C/o Isohara Plant of Nikko Mat.
    Kitaibaraki-shi, Ibaraki-Ken, 319-1535 (JP)

(74) Representative: Meddle, Alan Leonard 
FORRESTER & BOEHMERT, Pettenkoferstrasse 20-22
80336 München
80336 München (DE)

   


(54) MoSi2-based heating element and method for manufacturing the same


(57) There is provided an MoSi2-based heating element having improved durability, and a method for inhibiting the formation of defects during the processes for manufacturing such an MoSi2-based heating element. The MoSi2-based heating element is a heating element containing 70% or more MoSi2 in which the difference between the average density of the entire heating element and the density of the central portion corresponding to one fifth of the diameter of the heating element (true density ratio) is 5% or less, preferably 3% or less. In the process of temporary sintering, sintering is performed in a temperature pattern of an adequately adjusted temperature raising rate.







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