(19)
(11) EP 1 027 723 A2

(12)

(88) Date of publication A3:
05.08.1999

(43) Date of publication:
16.08.2000 Bulletin 2000/33

(21) Application number: 98947671.8

(22) Date of filing: 14.10.1998
(51) International Patent Classification (IPC)7H01L 21/00
(86) International application number:
PCT/GB9803/087
(87) International publication number:
WO 9919/900 (22.04.1999 Gazette 1999/16)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 14.10.1997 GB 9721808
14.10.1997 GB 9721809

(71) Applicant: Patterning Technologies Limited
Green Drift,Royston SG8 5DY (GB)

(72) Inventor:
  • SPEAKMAN, Stuart
    Little Waltham,Chelmsford CM3 3LW (GB)

(74) Representative: Cozens, Paul Dennis et al
Mathys & Squire100 Grays Inn Road
London WC1X 8AL
London WC1X 8AL (GB)

   


(54) METHOD OF FORMING AN ELECTRONIC DEVICE