(19)
(11)
EP 1 027 723 A2
(12)
(88)
Date of publication A3:
05.08.1999
(43)
Date of publication:
16.08.2000
Bulletin 2000/33
(21)
Application number:
98947671.8
(22)
Date of filing:
14.10.1998
(51)
International Patent Classification (IPC)
7
:
H01L
21/00
(86)
International application number:
PCT/GB9803/087
(87)
International publication number:
WO 9919/900
(
22.04.1999
Gazette 1999/16)
(84)
Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
(30)
Priority:
14.10.1997
GB 9721808
14.10.1997
GB 9721809
(71)
Applicant:
Patterning Technologies Limited
Green Drift,Royston SG8 5DY (GB)
(72)
Inventor:
SPEAKMAN, Stuart
Little Waltham,Chelmsford CM3 3LW (GB)
(74)
Representative:
Cozens, Paul Dennis et al
Mathys & Squire100 Grays Inn Road
London WC1X 8AL
London WC1X 8AL (GB)
(54)
METHOD OF FORMING AN ELECTRONIC DEVICE