(19)
(11)
EP 1 029 348 A1
(12)
(43)
Date of publication:
23.08.2000
Bulletin 2000/34
(21)
Application number:
97912629.9
(22)
Date of filing:
30.09.1997
(51)
International Patent Classification (IPC)
7
:
H01L
21/66
,
G01R
31/28
,
G01R
31/303
(86)
International application number:
PCT/SG9700/048
(87)
International publication number:
WO 9917/354
(
08.04.1999
Gazette 1999/14)
(84)
Designated Contracting States:
DE FR GB IT
(71)
Applicant:
SIEMENS AKTIENGESELLSCHAFT
80333 München (DE)
(72)
Inventor:
VADIVAZHAM, Kaleambur, Rajarathinam
Singapore 760655 (SG)
(74)
Representative:
Hermann, Uwe, Dipl.-Ing. et al
Epping, Hermann & FischerPostfach 12 10 26
80034 München
80034 München (DE)
(54)
A SYSTEM FOR IDENTIFYING DEFECTIVE ELECTRONIC DEVICES