(19)
(11) EP 1 029 348 A1

(12)

(43) Date of publication:
23.08.2000 Bulletin 2000/34

(21) Application number: 97912629.9

(22) Date of filing: 30.09.1997
(51) International Patent Classification (IPC)7H01L 21/66, G01R 31/28, G01R 31/303
(86) International application number:
PCT/SG9700/048
(87) International publication number:
WO 9917/354 (08.04.1999 Gazette 1999/14)
(84) Designated Contracting States:
DE FR GB IT

(71) Applicant: SIEMENS AKTIENGESELLSCHAFT
80333 München (DE)

(72) Inventor:
  • VADIVAZHAM, Kaleambur, Rajarathinam
    Singapore 760655 (SG)

(74) Representative: Hermann, Uwe, Dipl.-Ing. et al
Epping, Hermann & FischerPostfach 12 10 26
80034 München
80034 München (DE)

   


(54) A SYSTEM FOR IDENTIFYING DEFECTIVE ELECTRONIC DEVICES