(19)
(11) EP 1 029 360 A2

(12)

(88) Date of publication A3:
15.04.1999

(43) Date of publication:
23.08.2000 Bulletin 2000/34

(21) Application number: 98944438.5

(22) Date of filing: 14.08.1998
(51) International Patent Classification (IPC)7: H01L 29/43, H01L 23/485
(86) International application number:
PCT/US9816/900
(87) International publication number:
WO 9909/599 (25.02.1999 Gazette 1999/08)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 21.08.1997 US 915620
22.08.1997 US 920273

(71) Applicant: CUBIC MEMORY
Scotts Valley, CA 95066 (US)

(72) Inventors:
  • VINDASIUS, Alfons
    Saratoga, CA 95070 (US)
  • SAUTTER, Kenneth, M.
    Sunnyvale, CA 94086 (US)

(74) Representative: Hutchinson, Glenn Stanley 
Harrison Goddard FooteFountain PrecinctBalm Green
Sheffield S1 1RZ
Sheffield S1 1RZ (GB)

   


(54) VERTICAL INTERCONNECT PROCESS FOR SILICON SEGMENTS WITH DIELECTRIC ISOLATION