(19)
(11) EP 1 031 640 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
13.12.2006 Bulletin 2006/50

(45) Mention of the grant of the patent:
09.08.2006 Bulletin 2006/32

(21) Application number: 00103982.5

(22) Date of filing: 25.02.2000
(51) International Patent Classification (IPC): 
C23C 16/44(2006.01)
 B01D 8/00(2006.01)

(54)

Trap apparatus

Falle

Dispositif de piégeage

(84) Designated Contracting States:
DE FR GB

(30) Priority: 26.02.1999 JP 5061099

(43) Date of publication of application:
30.08.2000 Bulletin 2000/35

(73) Proprietor: EBARA CORPORATION
Ohta-ku, Tokyo (JP)

(72) Inventors:
  • Horie, Kuniaki, c/o Ebara Corporation
    Tokyo (JP)
  • Abe, Masahito, c/o Ebara Corporation
    Tokyo (JP)
  • Nakada, Tsutomu, c/o Ebara Corporation
    Tokyo (JP)
  • Araki, Yuji, c/o Ebara Corporation
    Tokyo (JP)

(74) Representative: Wagner, Karl H. et al
WAGNER & GEYER Patentanwälte Gewürzmühlstrasse 5
80538 München
80538 München (DE)


(56) References cited: : 
EP-A- 0 847 790
GB-A- 2 317 901
 DE-A- 3 517 533
US-A- 5 704 214
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).