(19)

(11)

EP 1 032 948 A1

(12)

(43) Date of publication: 06.09.2000 Bulletin 2000/36 (21) Application number: 98949767.2 (22) Date of filing: 05.10.1998

(51) International Patent Classification (IPC)7: H01L 21/68 (86) International application number: PCT/US9820/948 (87) International publication number: WO 9925/017 (20.05.1999 Gazette 1999/20)

(84) Designated Contracting States: BE DE FR GB NL (30) Priority: 12.11.1997 US 968217 (71) Applicant: Applied Materials, Inc. Santa Clara,California 95054 (US)	(72) Inventors: MAROHL, Dan, A. San Jose, CA 95123 (US) BRODINE, Jeffrey, A. Los Gatos, CA 95030 (US) SCHIAVO, Tony, P., Jr. San Mateo, CA 94403 (US) (74) Representative: Kahler, Kurt, Dipl.-Ing.  PatentanwälteKahler, Käck, Fiener et col.,Vorderer Anger 268 86899 Landsberg/Lech 86899 Landsberg/Lech (DE)