(19)
(11) EP 1 039 977 A1

(12)

(43) Date of publication:
04.10.2000 Bulletin 2000/40

(21) Application number: 98936795.8

(22) Date of filing: 06.07.1998
(51) International Patent Classification (IPC)7B08B 7/00, B29C 33/72
(86) International application number:
PCT/SG9800/058
(87) International publication number:
WO 9930/845 (24.06.1999 Gazette 1999/25)
(84) Designated Contracting States:
DE GB NL

(30) Priority: 18.12.1997 SG 9704544

(71) Applicants:
  • Advanced Systems Automation Limited
    Singapore 555854 (SG)
  • Data Storage Institute
    Singapore 119260 (SG)

(72) Inventors:
  • SONG, Wendong
    Singapore 640488 (SG)
  • LU, Yongfeng
    Singapore 604287 (SG)
  • CHEN, Qiong
    Singapore 120511 (SG)
  • TAY, Huck, Wee
    Singapore 521229 (SG)
  • HWA, Teik, Hing, Thomas
    Singapore 760389 (SG)
  • LIM, Lui, Ching, Dawn
    Singapore 520812 (SG)
  • NGIN, Jason, Yan, Koon
    Singapore 380050 (SG)
  • SIM, Jason, Yak, Hui
    Singapore 380099 (SG)
  • GOW, Cheng, Pak
    Singapore 588376 (SG)

(74) Representative: Newell, William Joseph et al
Wynne-Jones, Lainé & James22 Rodney Road
CheltenhamGloucestershire GL50 1JJ
CheltenhamGloucestershire GL50 1JJ (GB)

   


(54) A METHOD FOR REMOVING SURFACE CONTAMINANTS ON MOULDS USED IN SEMICONDUCTOR PACKAGING TOOLS