(19)

(11)

EP 1 042 816 A1

(12)

(43) Date of publication: 11.10.2000 Bulletin 2000/41 (21) Application number: 98959585.5 (22) Date of filing: 23.11.1998

(51) International Patent Classification (IPC)7: H01L 29/06, H01L 31/0328, H01L 31/0336, H01L 31/00 (86) International application number: PCT/US9825/047 (87) International publication number: WO 9927/583 (03.06.1999 Gazette 1999/22)

(84) Designated Contracting States: DE FR GB (30) Priority: 26.11.1997 US 66801 P (71) Applicant: CALIFORNIA INSTITUTE OF TECHNOLOGY PasadenaCalifornia 91125 (US)	(72) Inventors: BANDARA, Sumith, V. Valencia, CA 91355 (US) GUNAPALA, Sarath, D. Valencia, CA 91355 (US) (74) Representative: Lloyd, Patrick Alexander Desmond et al Reddie & Grose16 Theobalds Road London WC1X 8PL London WC1X 8PL (GB)