(19)
(11) EP 1 044 074 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
08.08.2007 Bulletin 2007/32

(45) Mention of the grant of the patent:
20.06.2007 Bulletin 2007/25

(21) Application number: 98967092.2

(22) Date of filing: 08.12.1998
(51) International Patent Classification (IPC): 
B05D 3/12(2006.01)
B05D 3/10(2006.01)
B05C 11/00(2006.01)
C23C 16/00(2006.01)
 B05D 3/02(2006.01)
H01L 21/469(2006.01)
B05C 11/02(2006.01)
(86) International application number:
PCT/US1998/026143
(87) International publication number:
WO 1999/029439 (17.06.1999 Gazette 1999/24)

(54)

PHOTORESIST COATING PROCESS CONTROL WITH SOLVENT VAPOR SENSOR

VERFAHRENSREGELUNG FÜR PHOTORESISTENTE BESCHICHTUNG MIT SOLVENTDAMPFSENSOR

COMMANDE DE PROCESSUS D'APPLICATION DE PHOTORESIST A DETECTEUR DE VAPEUR DE SOLVANT

(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 08.12.1997 US 987179

(43) Date of publication of application:
18.10.2000 Bulletin 2000/42

(60) Divisional application:
07007848.0

(73) Proprietor: ASML Holding N.V.
5504 DR Veldhoven (NL)

(72) Inventors:
  • Gurer, Emir
    Scotts Valley, CA 95066 (US)
  • Litvak, Herbert
    San Jose, CA 95120 (US)
  • Savage, Richard
    Scotts Valley, CA 95066 (US)

(74) Representative: McGowan, Cathrine 
D Young & Co 120 Holborn
London EC1N 2DY
London EC1N 2DY (GB)


(56) References cited: : 
EP-A- 0 810 478
US-A- 5 095 848
US-A- 5 571 560
 GB-A- 2 277 892
US-A- 5 417 100
US-A- 5 670 210
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).