ATBECHDEDKESFRGBGRITLILUNLSEMCPTIE......FI....CY................................*JDIM360 (Ver 1.5 21 Nov 2005) - 2999001/01044074CORRECTED EUROPEAN PATENT SPECIFICATIONB8B120070808W173deBibliographieenBibliographyfrBibliographieEP98967092.2199812082000070320060622enenen98717919971208US2007080820073220001018200042200706202007252007010320070808200732B05D 3/12 20060101AFI19990908BHEP B05D 3/02 20060101ALI19990908BHEP B05D 3/10 20060101ALI19990908BHEP H01L 21/469 20060101ALI19990908BHEP B05C 11/00 20060101ALI19990908BHEP B05C 11/02 20060101ALI19990908BHEP C23C 16/00 20060101ALI19990908BHEP deVERFAHRENSREGELUNG FÜR PHOTORESISTENTE BESCHICHTUNG MIT SOLVENTDAMPFSENSORenPHOTORESIST COATING PROCESS CONTROL WITH SOLVENT VAPOR SENSORfrCOMMANDE DE PROCESSUS D'APPLICATION DE PHOTORESIST A DETECTEUR DE VAPEUR DE SOLVANTEP-A- 0 810 478GB-A- 2 277 892US-A- 5 095 848US-A- 5 417 100US-A- 5 571 560US-A- 5 670 2102006011207007848.020070418Gurer, Emir709 Coast Range DriveScotts Valley, CA 95066USLitvak, Herbert790 Lodgewood CourtSan Jose, CA 95120USSavage, Richard5 Fox Sparrow CourtScotts Valley, CA 95066USASML Holding N.V.04440683P009229EP CMG CDe Run 65015504 DR VeldhovenNLMcGowan, Cathrine00126131D Young & Co 120 HolbornLondon EC1N 2DYGBATBECHCYDEDKESFIFRGBGRIEITLILUMCNLPTSEUS199802614319981208enWO19990294391999061719992420001018200042