......DE....FRGB................................................................JDIM360 Ver 2.15 (14 Jul 2008) - 2999001/01045438CORRECTED EUROPEAN PATENT SPECIFICATIONB8B120090325W173deBibliographieenBibliographyfrBibliographieEP00107939.1200004142004122220051208enenen1100619919990416JP2009032520091320001018200042200901072009022008072820090325200913H01L 21/66 20060101AFI20080707BHEP G01R 1/073 20060101ALI20080707BHEP G01R 1/04 20060101ALI20080707BHEP deTestsondenkarte und Testverfahren für eine HalbleitervorrichtungenProbe card for testing semiconductor device, and semiconductor device test methodfrCarte à sondes pour tester un dispositif semiconducteur et méthode de testEP-A- 0 484 141EP-A- 0 707 214US-A- 5 559 446US-A- 5 757 19908167734.62008102808167742.9202338620081028Maruyama, Shigeyukic/o Fujitsu Limited, 1-1, Kamikodanaka 4-chomeNakahara-ku, Kawasaki-shi, Kanagawa 211JPFujitsu Microelectronics Limited08676490HL-73496/JHS7-1, Nishi-Shinjuku 2-chome Shinjuku-kuTokyo 163-0722JPSunderland, James Harryet al00047951Haseltine Lake Lincoln House 300 High HolbornLondon WC1V 7JHGBDEFRGB20041006200441