(19)
(11) EP 1 047 127 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
28.02.2007 Bulletin 2007/09

(45) Mention of the grant of the patent:
29.11.2006 Bulletin 2006/48

(21) Application number: 00303273.7

(22) Date of filing: 18.04.2000
(51) International Patent Classification (IPC): 
H01L 21/8234(2006.01)

(54)

A method of forming a multi-layered dual-polysilicon structure

Verfahren zur Herstellung einer vielschichtigen Doppel-Polysiliziumstruktur

Procédé pour fabriquer une structure multicouches double en polysilicium

(84) Designated Contracting States:
DE FR GB

(30) Priority: 22.04.1999 US 298068

(43) Date of publication of application:
25.10.2000 Bulletin 2000/43

(73) Proprietor: Agere Systems, Inc.
Berkeley Heights NJ 07922-2747 (US)

(72) Inventors:
  • Chittipeddi, Sailesh
    Allentown, Pennsylvania 18104 (US)
  • Kelly, Michael J.
    Orefield, Pennsyvania 18069 (US)

(74) Representative: Williams, David John et al
Page White & Farrer Bedford House John Street
London, WC1N 2BF
London, WC1N 2BF (GB)


(56) References cited: : 
JP-A- 11 067 927
   
  • PATENT ABSTRACTS OF JAPAN vol. 0185, no. 45 (E-1617), 18 October 1994 (1994-10-18) & JP 6 196691 A (SONY CORP), 15 July 1994 (1994-07-15)
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).