METHOD OF CLEANING A CVD COLD-WALL CHAMBER AND EXHAUST LINES - Patent 1047808

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EP 1 047 808 A1

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(43)	Date of publication:
	02.11.2000 Bulletin 2000/44

(21)	Application number: 98957860.4

(22)	Date of filing: 12.11.1998

(51)	International Patent Classification (IPC)⁷: C23C 16/44, B01J 3/00

(86)	International application number:
	PCT/US9824/124

(87)	International publication number:
	WO 9936/589 (22.07.1999 Gazette 1999/29)

(84)	Designated Contracting States:
	DE FR

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Priority:

13.01.1998 US 6463

(71)	Applicant: Applied Materials, Inc.
	Santa Clara,California 95054 (US)

(72)	Inventors:
	COMITA, Paul, B. Menlo Park, CA 94025 (US) FORSTNER, Hali, J., L. Redwood City, CA 94063 (US) RANGANATHAN, Rekha Malden, MA 02148 (US)

(74)	Representative: Bayliss, Geoffrey Cyril et al
	BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)

(54)	METHOD OF CLEANING A CVD COLD-WALL CHAMBER AND EXHAUST LINES