THIN FILM TRANSISTORS AND THEIR MANUFACTURE - Patent 1048067

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EP 1 048 067 A1

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(43)	Date of publication:
	02.11.2000 Bulletin 2000/44

(21)	Application number: 99941553.2

(22)	Date of filing: 06.08.1999

(51)	International Patent Classification (IPC)⁷: H01L 21/336, H01L 29/786, H01L 29/49

(86)	International application number:
	PCT/EP9905/777

(87)	International publication number:
	WO 0011/709 (02.03.2000 Gazette 2000/09)

(84)	Designated Contracting States:
	DE FR GB NL

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Priority:

22.08.1998 GB 9818310

(71)	Applicant: Koninklijke Philips Electronics N.V.
	5621 BA Eindhoven (NL)

(72)	Inventor:
	FRENCH, Ian, D. NL-5656 AA Eindhoven (NL)

(74)	Representative: Stevens, Brian Thomas
	Philips Electronics UK LimitedPatents and Trade Marks DepartmentCross Oak Lane Redhill, Surrey RH1 5HA Redhill, Surrey RH1 5HA (GB)

(54)	THIN FILM TRANSISTORS AND THEIR MANUFACTURE