(19)
(11) EP 1 055 249 A1

(12)

(43) Date of publication:
29.11.2000 Bulletin 2000/48

(21) Application number: 99905871.2

(22) Date of filing: 08.02.1999
(51) International Patent Classification (IPC)7: H01J 37/32
(86) International application number:
PCT/US9902/718
(87) International publication number:
WO 9940/609 (12.08.1999 Gazette 1999/32)
(84) Designated Contracting States:
DE FR GB

(30) Priority: 09.02.1998 US 20960
20.07.1998 US 119417

(71) Applicant: APPLIED MATERIALS, INC.
Santa Clara,California 95054-3299 (US)

(72) Inventors:
  • YIN, Gerald
    Cupertino, CA 95014 (US)
  • KOLANDENKO, Arnold
    San Francisco, CA 94132 (US)
  • SHAN, Hong, Ching
    San Jose, CA 95132 (US)
  • LOEWENHARDT, Peter
    San Jose, CA 95124 (US)
  • LEE, Chii
    Fremont, CA 94539 (US)
  • YE, Yan
    Campbell, CA 95008 (US)
  • QIAN, Xueyn
    Milpitas, CA 95035 (US)
  • XU, Songlin
    Fremont, CA 94539 (US)
  • CHEN, Arthur
    Fremont, CA 94539 (US)
  • SATO, Arthur
    San Jose, CA 95129 (US)
  • GRIMBERGEN, Michael
    Redwood City, CA 94065 (US)
  • MA, Diana
    Saratoga, CA 95070 (US)
  • YAMARTINO, John
    Palo Alto, CA 94301 (US)
  • YAN, Chun
    Santa Clara, CA 95050 (US)
  • ZAWALSKI, Wade
    Sunnyvale, CA 94086 (US)

(74) Representative: Bayliss, Geoffrey Cyril 
BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road
London WC1X 8BT
London WC1X 8BT (GB)

   


(54) PLASMA ASSISTED PROCESSING CHAMBER WITH SEPARATE CONTROL OF SPECIES DENSITY