(19)
(11) EP 1 055 254 A2

(12)

(88) Date of publication A3:
20.07.2000

(43) Date of publication:
29.11.2000 Bulletin 2000/48

(21) Application number: 99944913.5

(22) Date of filing: 20.09.1999
(51) International Patent Classification (IPC)7H01L 21/00
(86) International application number:
PCT/KR9900/571
(87) International publication number:
WO 0017/912 (30.03.2000 Gazette 2000/13)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 19.09.1998 KR 9838834

(71) Applicant: Yang, Sei-Yang
Keumjeong-ku,Pusan 609-310 (KR)

(72) Inventor:
  • Yang, Sei-Yang
    Keumjeong-ku,Pusan 609-310 (KR)

(74) Representative: Kahlhöfer, Hermann, Dipl.-Phys. et al
Patent- und RechtsanwälteBardehle,Pagenberg,Dost,Altenburg, Geissler,IsenbruckUerdinger Str. 5
40474 Düsseldorf
40474 Düsseldorf (DE)

   


(54) A PROTOTYPING SYSTEM AND A METHOD FOR OPERATING THE SAME