(19)
(11)
EP 1 055 254 A2
(12)
(88)
Date of publication A3:
20.07.2000
(43)
Date of publication:
29.11.2000
Bulletin 2000/48
(21)
Application number:
99944913.5
(22)
Date of filing:
20.09.1999
(51)
International Patent Classification (IPC)
7
:
H01L
21/00
(86)
International application number:
PCT/KR9900/571
(87)
International publication number:
WO 0017/912
(
30.03.2000
Gazette 2000/13)
(84)
Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
(30)
Priority:
19.09.1998
KR 9838834
(71)
Applicant:
Yang, Sei-Yang
Keumjeong-ku,Pusan 609-310 (KR)
(72)
Inventor:
Yang, Sei-Yang
Keumjeong-ku,Pusan 609-310 (KR)
(74)
Representative:
Kahlhöfer, Hermann, Dipl.-Phys. et al
Patent- und RechtsanwälteBardehle,Pagenberg,Dost,Altenburg, Geissler,IsenbruckUerdinger Str. 5
40474 Düsseldorf
40474 Düsseldorf (DE)
(54)
A PROTOTYPING SYSTEM AND A METHOD FOR OPERATING THE SAME