Dressing apparatus and polishing apparatus

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EP 1 055 486 B8

(12)	CORRECTED EUROPEAN PATENT SPECIFICATION
	Note: Bibliography reflects the latest situation

(15)	Correction information:
	Corrected version no 1 (W1 B1)

(48)	Corrigendum issued on:
	05.08.2009 Bulletin 2009/32

(45)	Mention of the grant of the patent:
	04.03.2009 Bulletin 2009/10

(21)	Application number: 00110521.2

(22)	Date of filing: 17.05.2000

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International Patent Classification (IPC):

B24B 37/04^(2006.01)
H01L 21/304^(2006.01)

B24B 53/007^(2006.01)

(54)	Dressing apparatus and polishing apparatus Abrichtvorrichtung und Poliervorrichtung Dispositif de dressage et dispositif de polissage

(84)	Designated Contracting States:
	DE FR

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Priority:

17.05.1999 JP 13608799
07.04.2000 JP 2000107011

(43)	Date of publication of application:
	29.11.2000 Bulletin 2000/48

(73)	Proprietor: EBARA CORPORATION
	Ohta-ku, Tokyo (JP)

(72)	Inventors:
	Wakabayashi, Satoshi, c/o Ebara Corporation Tokyo (JP) Yamaguchi, Kuniaki, c/o Ebara Corporation Tokyo (JP) Togawa, Tetsuji, c/o Ebara Corporation Tokyo (JP) Takada, Nobuyuki, c/o Ebara Corporation Tokyo (JP) Nabeya, Osamu, c/o Ebara Corporation Tokyo (JP)

(74)	Representative: Wagner, Karl H.
	Wagner & Geyer Partnerschaft Patent- und Rechtsanwälte Gewürzmühlstrasse 5 80538 München 80538 München (DE)

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References cited: :

EP-A- 0 566 258
EP-A- 0 787 561
US-A- 5 743 784
US-A- 5 851 136

EP-A- 0 764 478
US-A- 5 036 015
US-A- 5 833 519

Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).