(19)
(11) EP 1 061 262 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
06.03.2002 Bulletin 2002/10

(43) Date of publication A2:
20.12.2000 Bulletin 2000/51

(21) Application number: 00112625.9

(22) Date of filing: 14.06.2000
(51) International Patent Classification (IPC)7: F04D 19/04, F04D 27/02
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 14.06.1999 JP 16663799

(71) Applicant: EBARA CORPORATION
Ohta-ku, Tokyo (JP)

(72) Inventors:
  • Shiokawa, Atsushi, c/o Ebara Corporation
    Tokyo (JP)
  • Sobukawa, Hiroshi, c/o Ebara Corporation
    Tokyo (JP)
  • Kawasaki, Hiroyuki, c/o Ebara Corporation
    Tokyo (JP)

(74) Representative: Wagner, Karl H., Dipl.-Ing. et al
Wagner & Geyer, Patentanwälte, Gewürzmühlstrasse 5
80538 München
80538 München (DE)

   


(54) Turbo-molecular pump


(57) A turbo-molecular pump includes a casing having an intake port (14a), a stator (S) fixedly mounted in the casing (14), and a rotor (R) supported in the casing (14) for rotation relatively to the stator. The stator and the rotor make up a turbine blade pumping section (L1) and a groove pumping section (L2) for evacuating gas. A scattering prevention member (50) is provided for preventing fragments of the rotor (R) from being scattered through the intake port (14a).






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