(19)
(11) EP 1 062 685 A1

(12)

(43) Date of publication:
27.12.2000 Bulletin 2000/52

(21) Application number: 99905434.9

(22) Date of filing: 14.01.1999
(51) International Patent Classification (IPC)7: H01L 21/00, H01L 21/30
(86) International application number:
PCT/US9900/783
(87) International publication number:
WO 9936/948 (22.07.1999 Gazette 1999/29)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 15.01.1998 US 71569 P

(71) Applicant: Kionix, Inc.
Ithaca, NY 14850 (US)

(72) Inventors:
  • DAVIS, Timothy, J.
    Trumansburg, NY 14886 (US)
  • ADAMS, Scott, G.
    Ithaca, NY 14850 (US)

(74) Representative: Albrecht, Thomas, Dr. 
Kraus, Weisert & PartnerPatent- und RechtsanwälteThomas-Wimmer-Ring 15
80539 München
80539 München (DE)

   


(54) INTEGRATED LARGE AREA MICROSTRUCTURES AND MICROMECHANICAL DEVICES