(19)

(11)

EP 1 064 713 A2

(12)

(88) Date of publication A3: 16.03.2000 (43) Date of publication: 03.01.2001 Bulletin 2001/01 (21) Application number: 99933725.6 (22) Date of filing: 07.07.1999

(51) International Patent Classification (IPC)7: H02K 41/00, G03B 27/42 (86) International application number: PCT/US9915/278 (87) International publication number: WO 0003/301 (20.01.2000 Gazette 2000/03)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 09.07.1998 JP 19387898 (71) Applicants: NIKON CORPORATION Tokyo 100 (JP) Hazelton, Andrew J. San Carlos, CA 94070 (US)	(72) Inventors: HAZELTON, Andrew, J. San Carlos, CA 94070 (US) TANAKA, Keiichi Chiba-ken (JP) EATON, John, K. Stanford, CA 94305 (US) (74) Representative: Bucks, Teresa Anne et al BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)