(19)
(11) EP 1 077 764 A1

(12)

(43) Date of publication:
28.02.2001 Bulletin 2001/09

(21) Application number: 99973699.4

(22) Date of filing: 05.11.1999
(51) International Patent Classification (IPC)7B01J 19/00, C01B 13/32, C01G 3/02
(86) International application number:
PCT/US9926/129
(87) International publication number:
WO 0048/725 (24.08.2000 Gazette 2000/34)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 17.02.1999 US 120720 P
27.09.1999 US 156264 P

(71) Applicant: Oxxel Oxide Electronics Technology, Inc.
Palo Alto, CA 94306 (US)

(72) Inventor:
  • BOZOVIC, Ivan
    Palo Alto, CA 94303 (US)

(74) Representative: Weber-Bruls, Dorothée, Dr. et al
Forrester & Boehmert,Franz-Joseph-Strasse 38
80801 München
80801 München (DE)

   


(54) METHOD FOR PREPARATION OF LIBRARIES USING A COMBINATORIAL MOLECULAR BEAM EPITAXY (COMBE) APPARATUS