(19)

(11)

EP 1 078 393 A2

(12)

(88) Date of publication A3: 13.01.2000 (43) Date of publication: 28.02.2001 Bulletin 2001/09 (21) Application number: 99944982.0 (22) Date of filing: 12.04.1999

(51) International Patent Classification (IPC)7: H01L 21/00 (86) International application number: PCT/US9907/907 (87) International publication number: WO 9960/606 (25.11.1999 Gazette 1999/47)

(84) Designated Contracting States: DE (30) Priority: 13.04.1998 US 81636 P 04.06.1998 US 90663 (71) Applicant: Tecstar Power Systems, Inc. City of Industry, CA 91745 (US)	(72) Inventors: RALPH, Eugene, L. San Gabriel, CA 91775 (US) LINDER, Ellen, B. Whittier, CA 90601 (US) HANLEY, James, P. Simi Valley, CA 93063 (US) DEWITT, Mark Simi Valley, CA 93065 (US) WALLE, James, R. Moorpark, CA 93021 (US) BEZE, Norman, L. Simi Valley, CA 93063 (US) (74) Representative: Fiener, Josef  Maximilianstrasse 57,P.O. Box 12 49 87712 Mindelheim 87712 Mindelheim (DE)