WET PROCESSING METHODS FOR THE MANUFACTURE OF ELECTRONIC COMPONENTS - Patent 1078394

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EP 1 078 394 A1

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(43)	Date of publication:
	28.02.2001 Bulletin 2001/09

(21)	Application number: 99920316.9

(22)	Date of filing: 04.05.1999

(51)	International Patent Classification (IPC)⁷: H01L 21/302, B08B 3/04, B08B 11/00

(86)	International application number:
	PCT/US9909/722

(87)	International publication number:
	WO 9957/754 (11.11.1999 Gazette 1999/45)

(84)	Designated Contracting States:
	DE FR GB IT

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Priority:

04.05.1998 US 84097 P
04.05.1998 US 304587

(71)	Applicant: CFMT, INC.
	Wilmington,Delaware 19803 (US)

(72)	Inventors:
	VERHAVERBEKE, Steven Radnor, PA 19087 (US) MCCONNELL, Christopher, F. Berwyn, PA 19312 (US) MYLAND, Lawrence, J. West Chester, PA 1938 (US)

(74)	Representative: W.P. THOMPSON & CO.
	Eastcheap HouseCentral Approach Letchworth,Hertfordshire SG6 3DS Letchworth,Hertfordshire SG6 3DS (GB)

(54)	WET PROCESSING METHODS FOR THE MANUFACTURE OF ELECTRONIC COMPONENTS