FIELD OF TECHNOLOGY
[0001] The present invention relates to a rotary brush suitable for a minute cleaning in
a process of the production of articles, for which extremely high surface accuracy
and cleanness are required, for example, electronics components, such as silicon wafer,
photo masks, magnetic disk substrates, glass substrates for liquid crystal, in particular,
to a rotary brush suitable for a brush scrubbing cleaning.
BACKGROUND OF TECHNOLOGY
[0002] There has been remarkably improved in the accuracy of various articles in electronics
industry during recent years, as represented, for example, by the degree of integrity
of a silicon wafer or the recording density on a magnetic disk, and accordingly there
have been great demands for the finishing accuracy of the surface of components and
cleanness. Especially, chemical contamination or adhered particles on the surface
of components could have a great effect on the yield or the reliability of the operation
of the products, and therefore the significance of the minute cleaning in a process
of production is great.
[0003] The wet brush scrubbing method was known as the conventional method for the minute
cleaning. In the brush scrubbing method, a rotating brush is forced against an object
to be cleaned while scrub-cleaning it with water or other cleaning liquid being supplied,
and the method is widely used, since the construction of the apparatus is simple and
the cleaning cost is low, and it shows an excellent cleaning power.
[0004] There are two types of shape of the brush, a roller type and cup type, used for the
brush scrubbing cleaning. The roller type brush makes a line contact whereas the cup
type brush makes a plane contact. The cup type brush therefore has advantages of a
broader contact area and less cleaning spots as compared with the roller type.
[0005] The cup type brush as commonly used has a brush body of a circular disk on which
a plurality of synthetic fiber monofilaments is planted or nonwoven fabrics are bonded.
[0006] However, the cup brush which employs synthetic fiber monofilaments or nonwoven fabrics
would possibly cause other troubles that there were scratches on the surface of an
object to be cleaned due to the stiffness of the fiber and the contamination by the
fiber coming off, or the like.
[0007] With regard to the troubles, there was made a proposal of a cleaning rotary brush
using cylindrical projections of a polyvinyl acetal (hereinafter referred to as PVAt)
elastomer as a contact portion with an object to be cleaned (Japanese Utility Model
Publication No. SHO-64-6953). The PVAt elastomer has excellent water-holding and abrasion
resistance properties and shows proper flexibility when water contained. Thus, the
cleaning rotary brush using PVAt elastomer is suitable for a minute cleaning of electronics
components, since it hardly makes scratches on an object to be cleaned and has excellent
durability.
[0008] In the cup brush, the dirt or particles scrubbed from the surface of an object to
be cleaned move together with the spent cleaning liquid over the surface of an object
to be cleaned to the outer periphery thereof, and are ultimately drained off to the
outside the system.
[0009] Although the conventional rotary brush using PVAt porous elastomer described above
was constructed taking into consideration the flow of the spent cleaning liquid over
the surface of an object to be cleaned, it could not fully meet the increased requirements
of the latest minute cleaning. In other words, the spent cleaning liquid containing
dirt or particles reside unnecessarily on the surface of an object to be cleaned,
and there could be a possibility of the recontamination on the surface of an object
to be cleaned of the dirt or particles residing for a longer time, and therefore,
it was demanded that the dirt, and the like scrubbed from the surface of an object
to be cleaned should be quickly drained off to the outside of the system and the occurrence
of such recontamination should be reduced further.
[0010] Moreover, in case of the residing particles being hard materials such as grit, when
the residing particles are forced against the surface of an object to be cleaned,
there could be scratches made by the particles on the surface of the object to be
cleaned. Since the PVAt porous elastomer in contact with the surface of the object
to be cleaned is flexible in the conventional rotary brush as described above, such
undesirable matter could be overcome to some extent, and however, the latest increased
requirements of the minute cleaning could not be met satisfactorily, and in this respect,
it was desired that the residing particles, and the like could be quickly drained
off to the outside of the system.
[0011] In view of the circumstances discussed above, the present invention has been made,
and the object is to provide a cleaning rotary brush which can drain off the particles
scrubbed from an object to be cleaned quickly to the outside of the system and has
an excellent cleaning efficiency.
DISCLOSURE OF INVENTION
[0012] In order to achieve the objects mentioned above, in the first embodiment of the present
invention, a cleaning rotary brush is provided with a hard base, when mounted to a
rotary shaft, having a rotating working surface opposite a portion to be cleaned,
and a plurality of cleaning members disposed on and projecting from the working surface,
the tops of said cleaning members being in contact with said portion to be cleaned
while rotating in substantially the same plane, characterized in that said cleaning
members made of a polyvinyl acetal porous elastomer and comprising a plurality of
ridged projections positioned continually on a plurality of phantom setting lines
extending from inner reference points on the side of the center of rotation of the
working surface to outer reference points on the side of the outer periphery of the
working surface, and the length in a longitudinal direction of said ridged projections
along said phantom setting lines being made longer than the length in a widthwise
direction of the ridged projections.
[0013] In the first embodiment, the inner reference point may be disposed further inside
the inner circle of the two concentric circles which trisect the distance between
the intersections of a line passing through the center of rotation with the innermost
and outermost edges of the sheet, and the outer reference point may be disposed further
outside the outer circle of the two circles.
[0014] Incidentally, the inner reference point may be disposed adjacent to the innermost
edge of the sheet, and the outer reference point may be disposed adjacent to the outermost
edge of the sheet.
[0015] In the second embodiment of the present invention, a cleaning rotary brush is provided
with a sheet member mounted on and rotating in unity with a rotating working surface
opposite a portion to be cleaned and cleaning members disposed on and projecting from
the sheet member, the tops of said cleaning members rotating in substantially the
same plane while being in contact with the portion to be cleaned, characterized in
that said cleaning members being made of a polyvinyl acetal porous elastomer and comprising
a plurality of ridged projections positioned continually on a plurality of phantom
setting lines extending from inner reference points on the side of the center of rotation
of the sheet member to outer reference points on the side of the outer periphery of
the sheet member, and the length in a longitudinal direction of said ridged projections
along said phantom setting lines being formed longer than the length in a widthwise
direction of the ridged projections.
[0016] In the second embodiment, the inner reference point may be disposed further inside
the inner circle of the two concentric circles which trisect the distance between
the intersections of a line passing through the center of rotation with the innermost
and outermost edges of the sheet member, and the outer reference point may be disposed
further outside the outer circle of the two circles.
[0017] Furthermore, the inner reference point may be disposed adjacent to the innermost
edge of the sheet member, and the outer reference point may be disposed adjacent to
the outermost edge of the sheet member.
[0018] Incidentally, the sheet member and ridged projections may also be made in unity of
a polyvinyl acetal porous elastomer.
[0019] Besides, in the first or second embodiment, the ridged projections may be formed
integrally and continually for each of the phantom setting lines. Incidentally, the
length in a longitudinal direction of the ridged projections may be formed more than
or equal to twice the length in a widthwise direction.
[0020] Furthermore, the length in a widthwise direction of the ridged projections may be
formed varying with the position on the phantom setting line. The third embodiment
of the present invention is characterized in that the phantom setting lines are generally
a straight line in the cleaning rotary brush of the first or second embodiment.
[0021] The fourth embodiment of the present invention is characterized in that the phantom
setting lines are at a slant to a line passing through the center of rotation in the
cleaning rotary brush of the third embodiment.
[0022] In the fourth embodiment, the crossing angle between the phantom setting line and
the line passing through the center of rotation and a midpoint that bisects the distance
between the inner and outer reference points of the phantom setting line may be limited
to a range of 0° to 45°.
[0023] Besides, the phantom setting lines may be all set at a slant backward in a direction
of the rotation of the base or sheet member.
[0024] In the fifth embodiment of the present invention, the cleaning rotary brush of the
first or second embodiment is characterized in that the phantom setting lines are
curvilinear.
[0025] In the sixth embodiment of the present invention, the cleaning rotary brush of the
fifth embodiment is characterized in that the phantom setting lines are a curve protruding
in one direction, and a tangent to the phantom setting line at a midpoint which bisects
the length along the phantom setting line between the inner and outer reference points
is at a slant with respect to a line passing through the center of rotation and midpoint.
[0026] In the sixth embodiment, the crossing angle between the tangent and the line passing
through the midpoint and center of rotation may be limited to a range of more than
0° to 45°.
[0027] Incidentally, the tangents to the respective curved lines at the midpoints may be
all set at a slant backwards in a direction of rotation of the base or sheet member.
[0028] Moreover, all the curved lines may be made to protrude forwards in a direction of
the rotation of the base or the sheet member.
[0029] In the seventh embodiment of the present invention, the cleaning rotary brush of
the fifth or sixth embodiment is characterized in that the phantom setting lines are
a curved line protruding in one direction, and the crossing angle between a line passing
through the center of rotation and an arbitrary point on the phantom setting line
and a tangent to the curved line at the arbitrary point approaches 90° as the arbitrary
point goes away from the center of rotation.
[0030] In the seventh embodiment, the crossing angle may be changed in a range of 0° to
45°.
[0031] When a portion to be cleaned is cleaned using the cleaning rotary brush of each of
the embodiments discussed above, the ridged projections rotating at a high speed by
the rotating shaft are forced against the portion to be cleaned at the same time water
or other cleaning liquid is supplied over the portion to be cleaned. By doing this,
the portion to be cleaned is scrub-cleaned effectively by means of the ridged projections
made of PVAt porous elastomer. Then, the dirt or particles scrubbed from the portion
to be cleaned move together with the spent cleaning liquid to the outer periphery
side and are finally drained off to outside of the system.
[0032] At this time, as the ridged projections continually extend from the inner reference
points on the side of the center of rotation of the working surface or sheet member
to the outer reference points on the side of the outer periphery, the spent cleaning
liquid containing the dirt or particles scrubbed from the portion to be cleaned receives
a centrifugal force and is adequately guided to the outer reference points. Thus,
the spent cleaning liquid is rapidly drained off to the outside of the system and
the residence time of the dirt or particles are remarkably reduced.
BRIEF DESCRIPTION OF THE DRAWINGS
[0033]
Figure 1 shows a plan view of a cleaning rotary brush of the first embodiment in accordance
with the present invention.
Figure 2 shows a sectional view taken on line II-II of Figure. 1.
Figure 3 shows a plan view of a cleaning rotary brush of the second embodiment in
accordance with the present invention.
Figure 4 shows a plan view of a cleaning rotary brush of the third embodiment in accordance
with the present invention.
Figure 5 shows a plan view of a cleaning rotary brush of the fourth embodiment in
accordance with the present invention.
Figure 6 shows a plan view of a cleaning rotary brush of the fifth embodiment in accordance
with the present invention.
Figure 7 shows a plan view of a cleaning rotary brush of the sixth embodiment in accordance
with the present invention.
Figure 8 shows further a plan view of a cleaning rotary brush of the seventh embodiment
in accordance with the present invention.
Figure 9 is an enlarged view of the essential portion in Figure. 8.
Figure 10 also shows a plan view of a sample for comparison.
THE BEST MODE OF THE EMBODIMENTS OF THE PRESENT INVENTION
[0034] The first embodiment of the present invention will be described hereinafter in connection
with Figures 1 and 2.
[0035] Figure 1 shows a plan view of a cleaning rotary brush of the first embodiment, and
Figure 2 shows a cross sectional view taken on line II-II of Figure 1.
[0036] As shown in Figures 1 and 2, a rotary brush 1 is provided with a hard base 3 made
of generally a circular disk like shaped metal or resin and a brush body 5 attached
to the base 3.
[0037] Base 3 has a circular hole 7 formed about its center. The base 3 is detachably fastened
to an end surface 9a of a rotary shaft 9 with a bolt 11 being inserted through the
circular hole 7, and is rotating together with the rotary shaft 9. Peripheral portions
13, 15 of the circular hole 7 of the front side 3a and back side 3b of the hollow
disk like base 3 abut respectively on bolt 11 and rotary shaft 9. Outer portions of
the front side 3a and back side 3b of the base 3 outside the peripheral portions 13,
15 of circular hole 7 form doughnut-surface shaped working surfaces 17, 19 rotating
in substantially the same plane with the base 3 attached to the rotary shaft 9. As
shown in Figure 2, when base 3 is attached to the rotary shaft 9, the working surface
17 of the front side 3a is placed opposite the surface of an object to be cleaned
21, and when the base 3 is attached to the rotary shaft 9 in reverse with that shown
in Figure 2, the working surface 19 of the back side 3b is placed opposite the surface
of an object to be cleaned 21.
[0038] The brush body 5 comprises two thin disk like sheets 23, 25 of the same shape, a
plurality (12 in number in the present embodiment) of ridged projections 27 projecting
as cleaning members from the respective sheets 23, 25, and a side edge portion 29
connecting the outer peripheral portions of both sheets 23, 25 together throughout
the entire circumstance. Both sheet members 23, 25, ridged projections 27, and side
edge portion 29 are integrally formed of a polyvinyl acetal (PVAt) porous elastomer,
which is elastic in wet condition.
[0039] One of the sheets 23 covers the working surface 17 of the front side 3a and the other
sheet 25 covers the working surface 19 of the back side 3b of the base 3, and the
side edge 29 covers the peripheral side edge of the base 3. Ridged projections 27
each are placed continually on one of the plural (12 in number) phantom setting lines
31 which extend straight from an inner reference point 31a on the side of the center
of rotation 35 of the working surface 17 and the sheet 23 up to an outer reference
point 31b on the side of the periphery of the working surface 17 and sheet 23. Incidentally,
with regard to the working surface 19, too, ridged projections 27 are placed continually
on phantom setting lines, which are set in the same manner as the working surface
17, and the shape thereof is the same as that of the ridged projections 27 on the
working surface 17, and therefore the detailed description thereof is omitted.
[0040] The phantom setting lines 31 pass through the center of rotation 35 of the working
surface 17 and sheet 23, and lie in radial lines which divide the circumference around
the center of rotation 35 into twelve equal sections. The reference point 31a is set
further inside an inner circle 39 of two concentric circles 39, 41 (referred hereinafter
to as reference concentric circles) and adjacent to the innermost edge 17a, where
the two concentric circles trisect the distance between the intersections 43 and 45
of lines 37 passing through the center of rotation 35 respectively with the innermost
edge 17a and outermost edge 17b of the working surface 17. The outer reference point
31b is set further outside the outer circle 41 of the two reference concentric circles
39, 41 and adjacent to the outermost edge 17b of the working surface 17.
[0041] Incidentally, the inner reference point 31a may be set further inside the inner circle
of the two concentric circles which trisect the distance between the intersections
of lines 37 passing through the center of rotation 35 respectively with the innermost
edge 23a and outermost edge 23b of the sheet 23, and the outer reference point 31b
may be set further outside the outer circle of the two circles. However in the present
embodiment the innermost edge 23a and outermost edge 23b of the sheet 3 are located
respectively nearly above the innermost edge 17a and outermost edge 17b of the working
surface 17, and therefore two concentric circles based on the sheet 23 are substantially
in agreement with the two reference concentric circles 39, 41 on the working surface
17.
[0042] The ridged projections 27 are formed generally elliptical in a plane view, generally
semi-circle in cross-section in a widthwise direction, and generally rectangular in
cross-section in a longitudinal direction, and the line opposite the bottom line of
the cross-section in a longitudinal direction form the tops which are in contact with
the surface of an object to be cleaned.
[0043] Each of the ridged projections 27 is formed with a length, L1, in a longitudinal
direction along the phantom setting line (the length of the phantom setting line 31)
being longer than a length, D1, in a width-wise direction perpendicular to the phantom
setting line 31. The ridged projections 27 each are generally at the same height in
projection, and the tops of the ridged projections 27 come into contact with the surface
of an object to be cleaned 21 while rotating substantially in the same plane. In view
of cleaning efficiency, length, L1, in a longitudinal direction is preferably more
than twice the length D1 in a widthwise direction (

), the length D1 in a widthwise direction is preferably in a range of 1/20 to 1/10
of the diameter of the working sheet 17 or sheet 23, and the height H of the ridged
projections 27 is preferably less than or equal to the length D1 in a widthwise direction,
and however these values should not be limited to those ranges indicated above.
[0044] Incidentally, if in the working sheet 17 or sheet 23 there is a big difference between
the area where are formed the ridged projections in contact with the surface of an
object to be cleaned and the area of the flat portions over which cleaning liquid
flows, a cleaning efficiency could be lower. In this regard, the entire area where
all the ridged projections 27 occupy compared to the whole area of the working sheet
17 or sheet 23 is preferably more than or equal to 20 % and less than or equal to
60%, and is more preferably more than or equal to 30 % and less than or equal to 50%.
[0045] For a method for preparing PVAt porous elastomer, one or more sorts of polyvinyl
alcohols having average polymerization degree of 300 ∼ 2000 and a saponification degree
of more than or equal to 80% are mixed into an aqueous solution, to which are added
aldehydes as a cross-linking agent, mineral acid as catalyst, and starches as pore
forming materials, and the mixed solution is poured into a given mold and reacted
at a temperature of 50 ∼ 80 °C, and then it is taken out from the mold, and it should
however not be limited to this method. Incidentally, after the completion of the reaction,
PVAt porous elastomer is used after it is taken out from the mold and rinsed with
pure water free of impurities such as particles, ions, organic materials, which would
be solved and suspending in water.
[0046] In the present embodiment, while the base 3 is held in the mold in advance, the mixed
solution is poured into the mold and reacted thereby forming integrally the base 3
and brush body 5. Thus the brush body 5 is held on the base 3 without using any adhesive,
or the like. Besides, the brush body 5 may be formed not integrally with the base
5, and instead one sheet 23 and the other sheet 25 may be formed separately, for instance,
and the respective sheets 23, 25 may be bonded to the base 3 with an adhesive or the
like.
[0047] The PVAt porous elastomer prepared by the method mentioned above is hardened in dry
conditions and softened in wet conditions. Additionally it shows excellent absorption
and water-holding properties, desirable flexibility and moderate repulsive elasticity
in wet conditions, and excellent abrasion-resistance.
[0048] Furthermore, PVAt porous elastomer forming the brush body 5 has preferably a porosity
of 80 % to 95 %, an average pore diameter of 30∝m to 250 ∝m, and 30 % compressive
stress of 15 g/cm
2 ∼ 150 g/cm
2 when containing 250 % ∼ 400 % of water relative to dry weight (this condition is
referred hereinafter to as an adequate water containing condition). If the porosity
is less than 80 %, the flexibility is insufficient in a wet state, and if the porosity
is more than 95 %, the practical strength is weak, and in any of the cases, it is
not suitable for use in cleaning. Moreover, if the average pore diameter is less than
30 ∝m, the elasticity in wet condition is not enough to get sufficient cleaning effect,
and if it is beyond 250 ∝m, mesh is rough, and therefore it is not suitable for minute
cleaning.
[0049] The porosity is defined herein as the value being calculated by following equation
(1) followed by a measurement, using a dry-typed automatic densimeter, of a rectangular
solid of PVAt porous elastomer, which was fully dried up with a dryer to obtain an
apparent volume and absolute volume of the rectangular solid.

[0050] The average pore diameter is the value determined by a mercury-injection pore measurement
using a mercury porosimeter manufactured by PORUS MATERIALS, INC.
[0051] Incidentally, the value of 30 % compressive stress is determined by setting PVAt
porous elastomer in an adequate water containing condition in a digital load gauge
with a load being applied upon the entire end surface, measuring the load when compressed
by 30 %, and dividing the measured load by the area of the end surface.
[0052] Next the operation of the present embodiment will be described. When the surface
of an object to be cleaned 21 is cleaned with rotary brush 1, ridged projections 27
rotating at a high speed by rotary shaft 9 are pressed against the to be cleaned surface
of an object while water or other cleaning liquid is supplied on the surface of an
object to be cleaned 21. Thus the entire region of the surface of an object to be
cleaned 21 is scrub-cleaned by the ridged projections 27 made of PVAt porous elastomer.
Then dirt or particles scrubbed from the surface of an object to be cleaned 21 move
over the surface of an object to be cleaned 21 together with the spent cleaning liquid
to its outer periphery and are finally drained off to the outside of the system (outside
the surface of an object to be cleaned 21).
[0053] At that time, the spent cleaning liquid containing dirt or particles scrubbed from
the surface of an object to be cleaned 21 receives a centrifugal force and is guided
by the ridged projections 27 and led adequately to outer reference point 31b, since
the ridged projections 27 continually extend from inner reference point 31a on the
side of the rotation center 35 of working surface 17 and sheet 23 to outer reference
point 31b on the side of the outer periphery. Thus, the spent cleaning liquid is quickly
drained off from the surface of an object to be cleaned 21 to the outside of the system,
and the residence time of the dirt or particles can be remarkably reduced.
[0054] Accordingly, recontamination on the surface of an object to be cleaned 21 of the
dirt or particles in the spent cleaning liquid is surely prevented.
[0055] Furthermore, even if residing particles are hard material such as grit, the occurrence
of scratches on the surface of an object to be cleaned 21 could be more reliably prevented
[0056] As described above, with the rotary brush 1 in accordance with the present embodiment,
dirt, and the like scrubbed from the surface of an object to be cleaned can be quickly
drained off to the outside of the system, and thus the rotary brush 1 is made to have
more excellent cleaning efficiency.
[0057] Incidentally, in case where both the front and back surfaces of a flat object to
be cleaned are washed, two rotary brushes are positioned generally in parallel, between
which the object to be cleaned is interposed so that both the surfaces of an object
to be cleaned are washed simultaneously. Further, a plurality of rotary brushes are
positioned generally in parallel at a fixed interval, and a plurality of objects to
be cleaned are interposed therebetween so that both surfaces of a number of objects
to be cleaned can be washed simultaneously.
[0058] Following is the second embodiment to be described in connection with Figure 3. Figure
3 is a plan view of a cleaning rotary brush in accordance with the second embodiment.
Incidentally, in the second through seven embodiments to be described hereinafter,
phantom setting lines 31 and/or ridged projections 27 in the first embodiment are
modified in their shapes, or other components are added, and therefore the components
similar to those in the first embodiments are marked with like reference numbers,
and the detailed description thereof will be omitted.
[0059] As shown in Figure 3, brush body 49 of rotary brush 47 in accordance with the present
embodiment is provided with two separate ridged projections in place of the ridged
projection 27 in the first embodiment. The two ridged projections 51, 53 are continually
provided on each of the phantom setting lines 31, and the length D2 in a widthwise
direction of the ridged projection 51 on the side of the center of rotation 35 is
formed shorter than the length D3 in a widthwise direction of the outer ridged projection
53. In case of such separated ridged projection 51, 53 being used, the word continually
means that a gap G in a longitudinal direction between the two ridged projections
51, 53 is set shorter than any of the lengths D2 and D3 in a widthwise direction respectively
of the ridged projections 51 and 53. Furthermore, the lengths L2 and L3 in a longitudinal
direction respectively of the ridged projections 51 and 53 are made longer than the
lengths D2 and D3 in a widthwise direction, and the respective ridged projections
51, 53 are at substantially the same projection heights.
[0060] Inner reference point 31a of the phantom setting line 31 in alignment with the innermost
edge of the ridged projection 53 on the side of rotation center 35 is set further
inside the inner circle 39 of the two reference concentric circles 39, 41 and is adjacent
to the innermost edge 17a of the working surface 17. Outer reference point 31b of
the phantom setting line 31 in alignment with the outermost edge of the outer ridged
projection 51 is set further outside the outer circle 41 of the two reference concentric
circles 39, 41, and is adjacent to the outermost edge 17b of the working surface 17.
[0061] According to the present embodiment, in the same manner as the first embodiment,
the spent cleaning liquid containing dirt or particles is guided by the continually
extending ridged projections 51, 53 and led adequately to the outer reference point
31b, and is rapidly drained off to the outside of the system, and therefore it can
provide a rotary brush 47 having more excellent cleaning efficiency.
[0062] Next, the third embodiment of the present invention will be described in connection
with Figure 4. As shown in Figure 4, in the brush body 57 of a rotary brush 55 in
accordance with the present embodiment, six phantom setting lines, every other lines
of the twelve phantom setting lines 31 in the first embodiment, are replaced with
six straight phantom setting lines 59 having a shorter length L4 (L4 < L1), and ridged
projections 61, 63 have different lengths in a widthwise direction varying with the
position on the phantom setting lines 31, 59.
[0063] The phantom setting lines 31 and 59 are positioned alternately. The inner reference
point 59a of the phantom setting line 59 is positioned outward from the inner reference
point 31a of the phantom setting line 31, and the outer reference point 59b is positioned
inward from the outer reference point 31b.
[0064] Additionally, the inner reference point 59a of the phantom setting line 59 is set
further inward from the inner circle 39 of the two reference concentric circles 39,
41, and the outer reference point 59b is set further outward from the outer circle
41.
[0065] The ridged projections 61 are arranged on the phantom setting lines 31 and formed
with the widths being gradually broader as it is away from the center of rotation
35, so that length D4 in a widthwise direction thereof is a minimum at the inner reference
point 31a and length D5 in a widthwise direction is a maximum at the outer reference
point 31b. Similarly, the ridged projections 63 are arranged on phantom setting lines
59 and formed with the widths being gradually broader as it is away from the center
of rotation 35, so that length D6 in a widthwise direction thereof is a minimum at
the inner reference point 59a and length D7 in a widthwise direction is maximum at
the outer reference point 59b. Incidentally, the longitudinal lengths L1, L4 of the
respective ridged projections are formed respectively longer than the minimum lengths
D4, D6, and the respective ridged projections 61, 63 are at substantially the same
heights in projection.
[0066] In accordance with the present embodiment, in the same manner as the first embodiment,
the spent cleaning liquid containing dirt or particles is guided by the continually
extending ridged projections 61, 63 and is led adequately to the outer reference points
31b, 59b and is quickly drained off to the outside of the system, and therefore it
can provide a rotary brush 55 having more excellent cleaning efficiency.
[0067] Next, the fourth embodiment of the present invention will be described in connection
with Figure 5. Figure 5 is a plan view of a cleaning rotary brush in accordance with
the fourth embodiment.
[0068] As shown in Figure 5, in the brush body 67 of a rotary brush 65 in accordance with
the present embodiment, six ridged projections, positioned on every other line, of
the twelve ridged projections 27 of the first embodiment are removed, and there are
arranged a plurality of projections 69 in the shape of, for example, a cylinder, hemisphere,
etc. instead of a ridged shape, on the sheets 23 between the remaining ridged projections
27.
[0069] That is, the cleaning members comprise the ridged projections 27 and projections
69.
[0070] According to the present embodiment, in addition to the cleaning effect due to the
projections 69, the spent cleaning liquid is guided by the ridged projections 27 to
be quickly drained off to the outside of the system, and therefore it can provide
a rotary brush 65 having more excellent cleaning efficiency in the same manner as
the first embodiment.
[0071] Next, the fifth embodiment of the present invention will be described in connection
with Figure 6. Figure 6 is a plan view of a cleaning rotary brush in accordance with
the fifth embodiment.
[0072] As shown in Figure 6, the brush body 73 of a rotary brush 71 in accordance with the
present embodiment is provided with ridged projections 77 on twelve straight phantom
setting lines 75 which are at a slant with respect to the lines passing through the
center of rotation 35.
[0073] The inner reference points 75a of the phantom setting lines 75 are set at regular
intervals on the circumference around the center of rotation 35. The inner reference
points 75a are set further inward from the inner circle 39 of the two concentric circles
39, 41 and adjacent to the innermost edge 17a of the working surface 17. The outer
reference points 75b are set further outward from the outer circle 41 and adjacent
to the outermost edge 17b of the working surface 17.
[0074] Crossing angle θ1 between each of the phantom setting lines 75 and a line 79 is set
at 30°, where the line 79 passes through the center of rotation 35 and the midpoint
75c that bisects the distance between the inner and outer reference points 75a and
75b of the phantom setting line 75. Incidentally, if the crossing angle θ1 is in a
range of 0° to 45°, it will do well.
[0075] The phantom setting lines 75 are all at a slant backward in a direction of the rotation
of the base 3 and sheets 23.
[0076] Furthermore, the longitudinal length L8 of the ridged projections 77 along the phantom
setting line 75 is formed longer than the length D8 in a widthwise direction, and
the ridged projections 77 each are at substantially the same height in projection.
[0077] In accordance with the present embodiment, the spent cleaning liquid is guided by
the ridged projections 77 to be rapidly drained off to the outside of the system in
the same manner as the first embodiment, and therefore it can provide a rotary brush
73 having more excellent cleaning efficiency. Next, the sixth embodiment of the present
invention will be described in connection with Figure 7. Figure 7 is a plan view of
a cleaning rotary brush in accordance with the sixth embodiment.
[0078] As shown in Figure 7, the brush body 83 of a rotary brush 81 in accordance with the
present embodiment has much the same construction as the fifth embodiment except for
the length of the phantom setting lines 85, the number of the lines, and the slant
angle.
[0079] Namely, the phantom setting lines 85 (ridged projections 87) are ten in number, and
crossing angle θ2 between each of the phantom setting lines 85 and a line 89 is set
at 45°, where the line 89 passes through the center of rotation 35 and the midpoint
85c that bisects the distance between the inner and outer reference points 85a and
85b of the phantom setting line 85. The inner reference points 85a of the phantom
setting lines 85 are set at regular intervals on the circumference around the center
of rotation 35. The inner reference points 85a are set further inward from the inner
circle 39 of the two concentric circles 39, 41 and adjacent to the innermost edge
17a of the working surface 17. The outer reference points 85b are set further outward
from the outer circle 41 of the two concentric circles 39, 41 and adjacent to the
outermost edge 17b of the working surface 17.
[0080] The phantom setting lines 85 are all equally at a slant backward in a direction of
the rotation of the base 3 and sheets 23. The longitudinal length L9 of the ridged
projections 87 is formed longer than the length D9 in a widthwise direction, and the
ridged projections each have substantially the same heights in projection.
[0081] In accordance with the present embodiment, the spent cleaning liquid is guided by
the ridged projections 87 to be rapidly drained off to the outside of the system in
the same manner as the first embodiment, and therefore it can provide a rotary brush
83 having more excellent cleaning efficiency. Next, the seventh embodiment of the
present invention will be described in connection with Figures 8 and 9. Figure 8 is
a plan view of a cleaning rotary brush in accordance with the seventh embodiment,
and Figure 9 is an enlarged view of the essential portion in Figure 8.
[0082] As shown in Figure 8, the brush body 93 of a rotary brush 91 in accordance with the
present embodiment is provided with twelve curved (curvilinear) phantom setting lines
95 protruding in one direction instead of the straight phantom setting lines 75 of
the fifth embodiment.
[0083] The inner reference points 95a of the phantom setting lines 95 are located at regular
intervals on the circumference around the center of rotation 35. The inner reference
points 95a are set further inward from the inner circle 39 of the two concentric circles
39, 41 and adjacent to the innermost edge 17a of the working surface 17. The outer
reference points 95b are set further outward from the outer circle 41 of the two concentric
circles 39, 41 and adjacent to the outermost edge 17b of the working surface 17.
[0084] The longitudinal length L10 of the ridged projections 97 along the phantom setting
line 95 is formed longer than length D10 in a widthwise direction along a direction
normal to the phantom setting line 95, and the ridged projections 97 each have substantially
the same projection height.
[0085] As shown in Figure 9, a tangent 101 to the phantom setting line 95 at the midpoint
95c which bisects the length along the phantom setting line 95 between the inner and
outer reference points 95a and 95b (the longitudinal length L10 of the ridged projection
97) is at a slant with respect to a line 103 which passes through the center of rotation
35 and midpoint 95c. The crossing angle θ3 between the line 103 and tangent 101 in
a range of 0° to 45° is satisfactory, and in the present embodiment it is set at 20°.
[0086] Incidentally, the crossing angle between a line passing through the center of rotation
35 and an arbitrary point in the phantom setting line 95 and a tangent 95 to the phantom
setting line 95 at the arbitrary point varies approaching 90° as the arbitrary point
goes away from the center of rotation 35. The crossing angle preferably varies in
a range of 0° to 45°, and in the present embodiment the crossing angle θ4 at the inner
reference point 95a is set at 10°, the crossing angle θ3 at the midpoint is 20° as
mentioned above, and the crossing angle θ5 at the outer reference point 95b is 30°
Additionally, all the phantom setting lines 95 are equally at a slant backward in
a direction of the rotation of the base 3 and sheets 23, and protrude forward in a
direction of the rotation of the base 3 and sheets 23.
[0087] In accordance with the present embodiment, the spent cleaning liquid is guided by
the ridged projections 97 to be rapidly drained off to the outside of the system in
the same manner as the first embodiment, and therefore it can provide a rotary brush
93 having more excellent cleaning efficiency. Next, the samples A, B, C, and D respectively
of the brushes 1, 71, 81, 91 relating to the first, fifth, sixth, and seventh embodiments
were prepared together with a comparison sample E of a rotary brush 111 as shown in
Figure 10, for which samples the cleaning tests were carried out, and the test results
will be described below in connection with Table 1.
Table 1
| Sample |
Shape of Phantom Setting Line |
Shape of Projection |
Number of Projection |
Time Needed for Cleaning |
| A |
Straight |
Ridged |
12 |
0.8 |
| Slant Angle of Phantom Setting Line: 0° |
| B |
Straight |
Ridged |
12 |
0.6 |
| Slant Angle of Phantom Setting Line at Middle Point: 30° |
| C |
Straight |
Ridged |
10 |
0.7 |
| Slant Angle of Phantom Setting Line at Middle Point: 45° |
| D |
Curvilinear |
Ridged |
12 |
0.4 |
| Slant Angle of Tangent to Phantom Setting Line: 10∼30° |
| E |
- |
Cylindrical |
60 |
1.0 |
[0088] The brush bodies 5, 73, 83, 93, and 113 of Samples A ∼ D and comparison sample E
were made of PVAt porous elastomer having a porosity of about 90% and an average pore
diameter of about 150∝m, and the outside diameter of the sheet 23 was 60mm. Furthermore,
the outside diameter of the working surface 17 was formed slightly smaller than the
outside diameter of the sheet 23.
[0089] Of the ridged projections 27, 77, 87, and 97 of the samples A ∼ D, the lengths of
D1, D8, D9, and D10 in a widthwise direction were set at 10mm, the longitudinal length
L1, L8, L9, L10 at 23mm, and the height at 6mm. The projections 115 of the comparison
sample E were cylindrical with the diameter of 10 mm, the height of 6 mm, and a total
of 60 projections, and they were positioned in nearly constant density on the sheets
23.
[0090] The space occupation factors of the area of the ridged projections 27, 77, 87, and
97 and projections 115 of the samples A ∼ D and comparison sample E with respect to
the sheet 23 were all about 40%.
[0091] The cleaning tests for each of the samples A ∼ E were carried out by cleaning the
surface of an aluminum disk for a diskette. The detailed test conditions are as follows:
[0092] The aluminum disk to be used was underwent final grinding with free grit, and was
roughly washed by means of a flow of water. A cleaning liquid was pure water having
particle controlled. There were water ejection holes, not shown in the drawings, provided
adjacent to the center of rotation of the respective rotary brushes 1, 71, 81, and
91, from which water ejection holes a cleaning liquid was fed onto the aluminum disk.
The rate of rotation of the rotary shaft 9 was 100 rpm, and the junction pressure
between each of the ridged projections 27, 77, 87, and 97 and the aluminum disk was
about 10g/cm
2. The evaluation of the cleaning tests was performed by measuring the cleaning time
needed when each of the samples A ∼ E was used, calculating the relative value of
the cleaning time for the respective samples A ∼ D where the cleaning time for the
comparison sample E was assumed at 1, and comparing those values. The cleaning time
was the time from the starting of the cleaning to the reaching of the cleaning completed
state where the cleaning completed state was assumed as the state when the number
of the particles contained in the cleaning liquid drained from the aluminum disk came
to under the predetermined number.
[0093] The results showed that in any case of the samples A to E used, the cleaning time
needed was shorter than that in case of the sample E with the good cleaning efficiency.
Additionally, in any of the samples A to E used, there was no scratch made on the
aluminum disk after cleaned.
[0094] Incidentally, although the rotary brushes 1, 47, 55, 65, 71, 81, and 91 were constructed
with the base 3 and brush bodies 5, 49, 57, 67, 73, 83, and 93, the rotary brushes
may be constructed with the brush bodies 5, 49, 57, 67, 73, 83, and 93 only, In the
case of the base 3 omitted, the sheet 23 may be attached on a rotatable working surface
with an adhesive, etc.
[0095] Moreover, a rotary brush may be constructed without a sheet 23. In this case the
ridged projections 27, 51, 61, 63, 77, 87, and 97 may be disposed directly on the
working surface 17 of the base 3 with an adhesive, etc.
[0096] Furthermore, the ridged projections 27, 51, 61, 63, 77, 87, and 97 may be configured
in rectangular shape in a plane view, a polygon such as generally a triangle, rectangular,
in cross section in a widthwise direction with their corners being rounded, and generally
a trapezoidal cross section in a longitudinal direction.
INDUSTRIAL USABILITY
[0097] As described above, in accordance with the present invention, the spent cleaning
liquid containing dirt or particles scrubbed from the object to be cleaned is guided
by the ridged projections and is led adequately to outer reference points and is rapidly
drained off to the outside of the system, and the residence time of the dirt or particles
can be remarkably reduced.
[0098] Accordingly, recontamination on an object to be cleaned of the dirt or particles
in the cleaning spent liquid is surely prevented. Moreover, even if residing particles
are hard material such as grit, the occurrence of scratch on the object to be cleaned
could be more reliably prevented.