A WAFER BUFFER STATION AND A METHOD FOR A PER-WAFER TRANSFER BETWEEN WORK STATIONS - Patent 1082755

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EP 1 082 755 A1

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(43)	Date of publication:
	14.03.2001 Bulletin 2001/11

(21)	Application number: 99921607.0

(22)	Date of filing: 30.04.1999

(51)	International Patent Classification (IPC)⁷: H01L 21/00

(86)	International application number:
	PCT/US9909/602

(87)	International publication number:
	WO 9960/614 (25.11.1999 Gazette 1999/47)

(84)	Designated Contracting States:
	CH DE GB LI NL

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Priority:

18.05.1998 US 80222

(71)	Applicant: Applied Materials, Inc.
	Santa Clara, CA 95024 (US)

(72)	Inventor:
	LAPIDOT, Zvi 76302 Rehovot (IL)

(74)	Representative: Bayliss, Geoffrey Cyril
	BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)

(54)	A WAFER BUFFER STATION AND A METHOD FOR A PER-WAFER TRANSFER BETWEEN WORK STATIONS