BATCH END EFFECTOR FOR SEMICONDUCTOR WAFER HANDLING - Patent 1084509

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EP 1 084 509 A1

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(43)	Date of publication:
	21.03.2001 Bulletin 2001/12

(21)	Application number: 99921826.6

(22)	Date of filing: 10.05.1999

(51)	International Patent Classification (IPC)⁷: H01L 21/00

(86)	International application number:
	PCT/US9910/194

(87)	International publication number:
	WO 9962/107 (02.12.1999 Gazette 1999/48)

(84)	Designated Contracting States:
	DE FR GB IE IT

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Priority:

27.05.1998 US 85553

(71)	Applicant: Varian Semiconductor Equipment Associates Inc.
	Gloucester, MA 01930 (US)

(72)	Inventor:
	MUKA, Richard, S. Topsfield, MA 01983 (US)

(74)	Representative: Read, Matthew Charles et al
	Venner Shipley & Co.20 Little Britain London EC1A 7DH London EC1A 7DH (GB)

(54)	BATCH END EFFECTOR FOR SEMICONDUCTOR WAFER HANDLING