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<ep-patent-document id="EP1084509A1" country="EP" dtd-version="ep-patent-document-v1-4.dtd" doc-number="1084509" date-publ="20010321" file="99921826.6" lang="en" kind="A1" status="n"><SDOBI lang="en"><B000><eptags><B001EP>......DE....FRGB..IT............IE................</B001EP><B003EP>*</B003EP><B005EP>X</B005EP><B007EP>DIM350   - Ver 2.1  (Jan 2001) 1100000/0 1710000/0</B007EP></eptags></B000><B100><B110>1084509</B110><B130>A1</B130><B140><date>20010321</date></B140><B190>EP</B190></B100><B200><B210>99921826.6</B210><B220><date>19990510</date></B220><B240><B241><date>20001030</date></B241></B240><B250>En</B250><B251EP>En</B251EP><B260>En</B260></B200><B300><B310>85553</B310><B320><date>19980527</date></B320><B330><ctry>US</ctry></B330></B300><B400><B405><date>20010321</date><bnum>200112</bnum></B405><B430><date>20010321</date><bnum>200112</bnum></B430></B400><B500><B510><B516>7</B516><B511> 7H 01L  21/00   A</B511></B510><B540><B541>de</B541><B542>MEHRFACH-GREIFORGAN FÜR HALBLEITERWAFERBEHANDLUNG</B542><B541>en</B541><B542>BATCH END EFFECTOR FOR SEMICONDUCTOR WAFER HANDLING</B542><B541>fr</B541><B542>EFFECTEUR TERMINAL DE LOT POUR LA MANIPULATION DE PLAQUETTES SEMI-CONDUCTRICES</B542></B540></B500><B700><B710><B711><snm>Varian Semiconductor Equipment Associates Inc.</snm><iid>02866960</iid><irf>03 37074</irf><adr><str>35 Dory Road</str><city>Gloucester, MA 01930</city><ctry>US</ctry></adr></B711></B710><B720><B721><snm>MUKA, Richard, S.</snm><adr><str>32 Candelwood Drive</str><city>Topsfield, MA 01983</city><ctry>US</ctry></adr></B721></B720><B740><B741><snm>Read, Matthew Charles</snm><sfx>et al</sfx><iid>00047911</iid><adr><str>Venner Shipley &amp; Co.20 Little Britain</str><city>London EC1A 7DH</city><ctry>GB</ctry></adr></B741></B740></B700><B800><B840><ctry>DE</ctry><ctry>FR</ctry><ctry>GB</ctry><ctry>IE</ctry><ctry>IT</ctry></B840><B860><B861><dnum><anum>US9910194</anum></dnum><date>19990510</date></B861><B862>En</B862></B860><B870><B871><dnum><pnum>WO9962107</pnum></dnum><date>19991202</date><bnum>199948</bnum></B871></B870></B800></SDOBI></ep-patent-document>
