(19)

(11)

EP 1 084 513 A1

(12)

(43) Date of publication: 21.03.2001 Bulletin 2001/12 (21) Application number: 99925733.0 (22) Date of filing: 21.05.1999

(51) International Patent Classification (IPC)7: H01L 21/768, C23C 16/18, C23C 16/56 (86) International application number: PCT/US9911/272 (87) International publication number: WO 9963/590 (09.12.1999 Gazette 1999/49)

(84) Designated Contracting States: BE DE GB NL (30) Priority: 05.06.1998 US 92477 (71) Applicant: Applied Materials, Inc. Santa Clara,California 95054 (US)	(72) Inventors: BHAN, Mohan, K. Cupertino, CA 95014 (US) CHEN, Ling Sunnyvale, CA 94087 (US) ZHENG, Bo San Jose, CA 95129 (US) JONES, Justin San Francisco, CA 94115 (US) GANGULI, Seshadri Santa Clara, CA 95051 (US) LEVINE, Timothy Santa Clara, CA 95050 (US) WILSON, Samuel Sunnyvale, CA 94086 (US) CHANG, Mei Saratoga, CA 95070 (US)