(19)

(11)

EP 1 086 482 A1

(12)

(43) Date of publication: 28.03.2001 Bulletin 2001/13 (21) Application number: 99930228.4 (22) Date of filing: 11.06.1999

(51) International Patent Classification (IPC)7: H01J 37/34, C23C 16/44, C23C 14/34, C23C 14/56 (86) International application number: PCT/US9913/308 (87) International publication number: WO 9965/057 (16.12.1999 Gazette 1999/50)

(84) Designated Contracting States: BE DE GB IE NL (30) Priority: 12.06.1998 JP 16533998 13.10.1998 US 170842 (71) Applicant: Applied Materials, Inc. Santa Clara,California 95054 (US)	(72) Inventor: IKEDA, Towl Inba-gun,Chiba 286-21 (JP) (74) Representative: Bayliss, Geoffrey Cyril et al BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)