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(11)

EP 1 086 484 A1

(12)

(43) Date of publication: 28.03.2001 Bulletin 2001/13 (21) Application number: 99916387.6 (22) Date of filing: 05.04.1999

(51) International Patent Classification (IPC)7: H01L 21/00, B44C 1/22, C09G 1/00 (86) International application number: PCT/US9907/482 (87) International publication number: WO 9953/532 (21.10.1999 Gazette 1999/42)

(84) Designated Contracting States: DE ES FR GB IT (30) Priority: 10.04.1998 US 58618 26.03.1999 US 277454 (71) Applicant: FERRO CORPORATION ClevelandOhio 44114 (US)	(72) Inventors: PRENDERGAST, John, E. Geneva, NY 14456 (US) HER, Yieshein Canandaigua, NY 14424 (US) BABU, Suryadevara, V. Potsdam, NY 13676 (US) LI, Yuzhuo Potsdam, NY 13676 (US) HARIHARAPUTHIRAN, Mariappan c/o Bell Labs Orlando, Florida 32819 (US) (74) Representative: Reinhardt, Markus  Patentanwälte,Reinhardt Söllner Ganahl,Hausen 5b 85551 Kirchheim 85551 Kirchheim (DE)