PROCESS AND MANUFACTURING TOOL ARCHITECTURE FOR USE IN THE MANUFACTURE OF ONE OR MORE METALLIZATION LEVELS ON A WORKPIECE - Patent 1086485

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EP 1 086 485 A2

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(88)	Date of publication A3:
	06.04.2000

(43)	Date of publication:
	28.03.2001 Bulletin 2001/13

(21)	Application number: 99922934.7

(22)	Date of filing: 12.05.1999

(51)	International Patent Classification (IPC)⁷: H01L 21/00

(86)	International application number:
	PCT/US9910/331

(87)	International publication number:
	WO 9959/190 (18.11.1999 Gazette 1999/46)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

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Priority:

12.05.1998 US 76565
12.05.1998 US 76695
03.08.1998 US 128238

(71)	Applicant: SEMITOOL, INC.
	Kalispell,Montana 59901 (US)

(72)	Inventors:
	STEVENS, E., Henry Colorado Springs, CO 80906 (US) BERNER, Robert, W. Eagle, ID 83616 (US)

(74)	Representative: Hirsch, Peter
	Klunker Schmitt-Nilson HirschWinzererstrasse 106 80797 München 80797 München (DE)

(54)	PROCESS AND MANUFACTURING TOOL ARCHITECTURE FOR USE IN THE MANUFACTURE OF ONE OR MORE METALLIZATION LEVELS ON A WORKPIECE