METHODS OF WET PROCESSING ELECTRONIC COMPONENTS USING PROCESS LIQUIDS WITH CONTROLLED LEVELS OF GASES - Patent 1087848

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EP 1 087 848 A1

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(43)	Date of publication:
	04.04.2001 Bulletin 2001/14

(21)	Application number: 99908366.0

(22)	Date of filing: 23.02.1999

(51)	International Patent Classification (IPC)⁷: B08B 3/12, B08B 3/10

(86)	International application number:
	PCT/US9903/880

(87)	International publication number:
	WO 9943/448 (02.09.1999 Gazette 1999/35)

(84)	Designated Contracting States:
	DE FR GB IT

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Priority:

27.02.1998 US 76175 P
19.02.1999 US 253157

(71)	Applicant: CFMT, INC.
	Wilmington,Delaware 19803 (US)

(72)	Inventors:
	BAY, Steven, T. Downingtown, PA 19335 (US) DURR, Kevin, R. West Chester, PA 19380 (US) MCCONNELL, Christopher, F. Berwyn, PA 19312 (US) VERHAVERBEKE, Steven Radnor, PA 19087 (US)

(74)	Representative: W.P. THOMPSON & CO.
	Eastcheap HouseCentral Approach Letchworth,Hertfordshire SG6 3DS Letchworth,Hertfordshire SG6 3DS (GB)

(54)	METHODS OF WET PROCESSING ELECTRONIC COMPONENTS USING PROCESS LIQUIDS WITH CONTROLLED LEVELS OF GASES