(19)

(11)

EP 1 088 320 A1

(12)

(43) Date of publication: 04.04.2001 Bulletin 2001/14 (21) Application number: 99909560.7 (22) Date of filing: 24.02.1999

(51) International Patent Classification (IPC)7: H01J 1/62, H01J 1/63, H01L 35/24, H01L 33/00 (86) International application number: PCT/US9903/900 (87) International publication number: WO 9960/599 (25.11.1999 Gazette 1999/47)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 18.05.1998 US 85910 P (71) Applicant: FED CORPORATION Hopewell Junction, NY 12533 (US)	(72) Inventors: JONES, Gary, W. Lagrangeville, NY 12540 (US) HOWARD, Webster, E. Lagrangeville, NY 12540 (US) (74) Representative: Grünecker, Kinkeldey, Stockmair & SchwanhäusserAnwaltssozietät  Maximilianstrasse 58 80538 München 80538 München (DE)