(19)

(11)

EP 1 088 337 A1

(12)

(43) Date of publication: 04.04.2001 Bulletin 2001/14 (21) Application number: 00918167.8 (22) Date of filing: 20.03.2000

(51) International Patent Classification (IPC)7: H01L 21/00 (86) International application number: PCT/US0007/394 (87) International publication number: WO 0059/006 (05.10.2000 Gazette 2000/40)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 30.03.1999 US 281619 (71) Applicant: Koninklijke Philips Electronics N.V. 5621 BA Eindhoven (NL)	(72) Inventors: ZHANG, Liming Sunnyvale, CA 94087 (US) WELING, Milind, G. San Jose, CA 95131 (US) (74) Representative: Smeets, Eugenius Theodorus J. M.  INTERNATIONAAL OCTROOIBUREAU B.V.,Prof. Holstlaan 6 5656 AA Eindhoven 5656 AA Eindhoven (NL)