(19)
(11) EP 1 089 593 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
28.08.2002 Bulletin 2002/35

(43) Date of publication A2:
04.04.2001 Bulletin 2001/14

(21) Application number: 00308583.4

(22) Date of filing: 29.09.2000
(51) International Patent Classification (IPC)7: H05B 3/14, H05B 3/28, H01L 21/00, H01L 21/68
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 01.10.1999 JP 28111599

(71) Applicant: NGK INSULATORS, LTD.
Nagoya-City, Aichi Prefecture 467-8530 (JP)

(72) Inventors:
  • Yamada, Atsuo, c/o NGK Insulators, Ltd.
    Nagoya City, Aichi Pref. (JP)
  • Yamaguchi, Shinji, c/o NGK Insulators, Ltd.
    Nagoya City, Aichi Pref. (JP)

(74) Representative: Paget, Hugh Charles Edward et al
MEWBURN ELLIS York House 23 Kingsway
London WC2B 6HP
London WC2B 6HP (GB)

   


(54) Ceramic heater


(57) A ceramic heater comprising a ceramic substrate having a heating face, and a resistance heat generator buried in the ceramic substrate, wherein the resistance heat generator comprises plural planar resistance heating elements arranged in a layered fashion as viewed in a thickness direction of the ceramic substrate, and each of said plural planar heating elements comprises a heat generation density-increased portion, and the heat generation density-increased portions of the respective plural planar heating elements are located in different portions, respectively.






Search report