METHOD AND APPARATUS FOR RECOVERY OF WATER AND SLURRY ABRASIVES USED FOR CHEMICAL AND MECHANICAL PLANARIZATION - Patent 1089801

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EP 1 089 801 A1

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(43)	Date of publication:
	11.04.2001 Bulletin 2001/15

(21)	Application number: 99925812.2

(22)	Date of filing: 25.05.1999

(51)	International Patent Classification (IPC)⁷: B01D 37/04, C02F 1/44

(86)	International application number:
	PCT/US9911/498

(87)	International publication number:
	WO 9965/592 (23.12.1999 Gazette 1999/51)

(84)	Designated Contracting States:
	AT DE ES FI FR GB IE IT NL SE

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Priority:

18.06.1998 US 99280

(71)	Applicant: Lucid Treatment Systems, Inc.
	Hollister, CA 95023 (US)

(72)	Inventors:
	CORLETT, Gary, L. Hollister, CA 95023 (US) FERRI, Edward, T., Jr. Gilroy, CA 95020 (US) GEATZ, J., Tobin Wilmington, NC 28409 (US)

(74)	Representative: McLeish, Nicholas Alistair Maxwell et al
	Boult Wade TennantVerulam Gardens70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)

(54)	METHOD AND APPARATUS FOR RECOVERY OF WATER AND SLURRY ABRASIVES USED FOR CHEMICAL AND MECHANICAL PLANARIZATION