(19)
(11) EP 1 089 951 A1

(12)

(43) Date of publication:
11.04.2001 Bulletin 2001/15

(21) Application number: 00915656.3

(22) Date of filing: 02.03.2000
(51) International Patent Classification (IPC)7: C04B 35/45, H01L 39/24
(86) International application number:
PCT/SE0000/429
(87) International publication number:
WO 0051/948 (08.09.2000 Gazette 2000/36)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 02.03.1999 SE 9900759

(71) Applicants:
  • Muhammed, Mamoun
    100 44 Stockholm (SE)
  • Zhang, Yu
    100 44 Stockholm (SE)
  • Wang, Lingna
    100 44 Stockholm (SE)

(72) Inventors:
  • Muhammed, Mamoun
    100 44 Stockholm (SE)
  • Zhang, Yu
    100 44 Stockholm (SE)
  • Wang, Lingna
    100 44 Stockholm (SE)

(74) Representative: Bergstrand, Mikael Gudmundsson 
Albihns Stockholm ABP.O. Box 5581
114 85 Stockholm
114 85 Stockholm (SE)

   


(54) A METHOD FOR PRODUCING NANO-ENGINEERED PRECURSORS