(19)
(11) EP 1 090 159 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
10.06.2009 Bulletin 2009/24

(45) Mention of the grant of the patent:
11.03.2009 Bulletin 2009/11

(21) Application number: 98953847.5

(22) Date of filing: 20.10.1998
(51) International Patent Classification (IPC): 
C23C 8/00(2006.01)
H05H 1/24(2006.01)
 C23C 16/00(2006.01)
(86) International application number:
PCT/US1998/022306
(87) International publication number:
WO 1999/020809 (29.04.1999 Gazette 1999/17)

(54)

DEPOSITION OF COATINGS USING AN ATMOSPHERIC PRESSURE PLASMA JET

AUFBRINGEN VON BESCHICHTUNGEN MIT EINEM PLASMASTRAHL UNTER ATMOSPHÄRENDRUCK

DEPOT DE REVETEMENTS A L'AIDE D'UN JET DE PLASMA A PRESSION ATMOSPHERIQUE

(84) Designated Contracting States:
BE CH DE FR LI NL

(30) Priority: 20.10.1997 US 62822 P

(43) Date of publication of application:
11.04.2001 Bulletin 2001/15

(73) Proprietor: Los Alamos National Security, LLC
Los Alamos, NM 87545 (US)

(72) Inventors:
  • BABAYAN, Steve, E.
    Huntington Beach, CA 92648 (US)
  • SELWYN, Gary, S.
    Santa Fe, NM 87505 (US)
  • HICKS, Robert, F.
    Los Angeles, CA 90024 (US)

(74) Representative: Johnson, Richard Alan et al
Mewburn Ellis LLP 33 Gutter Lane
London EC2V 8AS
London EC2V 8AS (GB)


(56) References cited: : 
EP-A- 0 624 897
DE-A- 3 014 258
US-A- 5 369 336
US-A- 5 648 147
 WO-A-98/35379
US-A- 5 256 205
US-A- 5 370 737
US-A- 5 648 147
   
  • BABAYAN S E ET AL: "Deposition of silicon dioxide films with an atmospheric-pressure plasma jet" PLASMA SOURCES SCI. TECHNOL. (UK), PLASMA SOURCES, SCIENCE AND TECHNOLOGY,, vol. 7, no. 3, August 1998 (1998-08), pages 286-288, XP001196924 IOP PUBLISHING, UK ISSN: 0963-0252
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).