ENDPOINT DETECTION IN THE FABRICATION OF ELECTRONIC DEVICES - Patent 1090420

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EP 1 090 420 A1

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(43)	Date of publication:
	11.04.2001 Bulletin 2001/15

(21)	Application number: 00916462.5

(22)	Date of filing: 16.03.2000

(51)	International Patent Classification (IPC)⁷: H01L 21/66, C23C 16/44, C23C 16/52, G01B 11/06, H01J 37/32

(86)	International application number:
	PCT/US0007/070

(87)	International publication number:
	WO 0060/657 (12.10.2000 Gazette 2000/41)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

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Priority:

05.04.1999 US 286493

(60)	Divisional application:
	01101049.3

(71)	Applicant: Applied Materials, Inc.
	Santa Clara,California 95052 (US)

(72)	Inventors:
	GRIMBERGEN, Michael, N. Redwood City, CA 94065 (US) LILL, Thorsten, B. Sunnyvale, CA 94087 (US)

(74)	Representative: Bayliss, Geoffrey Cyril et al
	BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)

(54)	ENDPOINT DETECTION IN THE FABRICATION OF ELECTRONIC DEVICES