(19)
(11) EP 1 091 811 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
07.12.2005 Bulletin 2005/49

(45) Mention of the grant of the patent:
13.07.2005 Bulletin 2005/28

(21) Application number: 99912557.8

(22) Date of filing: 15.03.1999
(51) International Patent Classification (IPC)7: B08B 3/02, H01L 21/3213
(86) International application number:
PCT/US1999/005674
(87) International publication number:
WO 1999/046064 (16.09.1999 Gazette 1999/37)

(54)

SELECTIVE TREATMENT OF THE SURFACE OF A MICROELECTRONIC WORKPIECE

SELEKTIVE BEHANDLUNG DER OBERFLÄCHE EINES MIKROELEKTRONISCHEN WERKSTÜCKS

TRAITEMENT SELECTIF DE LA SURFACE D'UNE PIECE MICROELECTRONIQUE

(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 13.03.1998 US 41901
13.03.1998 US 41649
10.07.1998 US 113435
22.01.1999 US 116750 P
27.01.1999 US 117474 P

(43) Date of publication of application:
18.04.2001 Bulletin 2001/16

(60) Divisional application:
05015153.9 / 1589568

(73) Proprietor: SEMITOOL, INC.
Kalispell, Montana 59901 (US)

(72) Inventors:
  • AEGERTER, Brian
    Kalispell, MT 59901 (US)
  • DUNDAS, Curt, T.
    Kalispell, MN 59901 (US)
  • JOLLEY, Michael
    Kalispell, MT 59901 (US)
  • RITZDORF, Tom, L.
    Bigfork, MT 59911 (US)
  • CURTIS, Gary, L.
    Kila, MT 59920 (US)

(74) Representative: Viering, Jentschura & Partner 
Postfach 22 14 43
80504 München
80504 München (DE)


(56) References cited: : 
EP-A- 0 924 754
DE-A- 4 109 955
JP-A- 1 120 023
JP-A- 5 326 483
JP-A- 62 166 515
US-A- 4 439 244
US-A- 4 790 262
US-A- 4 903 717
US-A- 5 474 807
 EP-A- 1 037 261
DE-A- 4 202 194
JP-A- 5 013 322
JP-A- 6 045 302
US-A- 4 439 243
US-A- 4 732 785
US-A- 4 838 289
US-A- 5 349 978
   
  • PATENT ABSTRACTS OF JAPAN vol. 1997, no. 11, 28 November 1997 (1997-11-28) -& JP 09 181026 A (TOSHIBA CORP), 11 July 1997 (1997-07-11)
  • PATENT ABSTRACTS OF JAPAN vol. 1997, no. 02, 28 February 1997 (1997-02-28) & JP 08 279494 A (SEIKO EPSON CORP), 22 October 1996 (1996-10-22) -& US 6 004 631 A (SEIKO EPSON CORPORATION) 21 December 1999 (1999-12-21)
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).