ATBECHDEDKESFRGBGRITLILUNLSEMCPTIE......FI....CY................................*JDIM350 (Ver 2.1 Jan 2001) 2999001/01091811CORRECTED EUROPEAN PATENT SPECIFICATIONB8B120051207W10000000072DEBibliographieENBibliographyFRBibliographieEP99912557.8199903152000101220020508enenen4190119980313US4164919980313US11343519980710US116750 P19990122US117474 P19990127US20051207200549200104182001162005071320052820041230200512072005497 7B 08B 3/02 A 7H 01L 21/3213 BdeSELEKTIVE BEHANDLUNG DER OBERFLÄCHE EINES MIKROELEKTRONISCHEN WERKSTÜCKSenSELECTIVE TREATMENT OF THE SURFACE OF A MICROELECTRONIC WORKPIECEfrTRAITEMENT SELECTIF DE LA SURFACE D'UNE PIECE MICROELECTRONIQUEEP-A- 0 924 754EP-A- 1 037 261DE-A- 4 109 955DE-A- 4 202 194JP-A- 1 120 023JP-A- 5 013 322JP-A- 5 326 483JP-A- 6 045 302JP-A- 62 166 515US-A- 4 439 243US-A- 4 439 244US-A- 4 732 785US-A- 4 790 262US-A- 4 838 289US-A- 4 903 717US-A- 5 349 978US-A- 5 474 807PATENT ABSTRACTS OF JAPAN vol. 1997, no. 11, 28 November 1997 (1997-11-28) -& JP 09 181026 A (TOSHIBA CORP), 11 July 1997 (1997-07-11)PATENT ABSTRACTS OF JAPAN vol. 1997, no. 02, 28 February 1997 (1997-02-28) & JP 08 279494 A (SEIKO EPSON CORP), 22 October 1996 (1996-10-22) -& US 6 004 631 A (SEIKO EPSON CORPORATION) 21 December 1999 (1999-12-21)2001121305015153.9158956820050712AEGERTER, Brian27-7th Avenue WestKalispell, MT 59901USDUNDAS, Curt, T.715 Liberty Street 3Kalispell, MN 59901USJOLLEY, Michael115 BluegrassKalispell, MT 59901USRITZDORF, Tom, L.3130 ParkwoodBigfork, MT 59911USCURTIS, Gary, L.655 Hoffman DrawKila, MT 59920USSEMITOOL, INC.00705650P 19711655 West Reserve DriveKalispell, Montana 59901USViering, Jentschura & Partner00100645Postfach 22 14 4380504 MünchenDEATBECHCYDEDKESFIFRGBGRIEITLILUMCNLPTSEUS199900567419990315enWO199904606419990916199937