(19)
(11) EP 1 094 040 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
30.05.2007 Bulletin 2007/22

(45) Mention of the grant of the patent:
21.02.2007 Bulletin 2007/08

(21) Application number: 00122418.7

(22) Date of filing: 13.10.2000
(51) International Patent Classification (IPC): 
C03C 3/06(2006.01)
C03C 4/00(2006.01)
 C03B 19/14(2006.01)

(54)

Silica glass optical material for excimer laser and excimer lamp, and method for producing the same

Optischer Werkstoff aus Quarzglas für Excimer Laser und Excimer Lampe, und Verfahren zu dessen Herstellung

Matériau optique en verre de silice pour laser excimère et lampe excimère, et méthode de son production

(84) Designated Contracting States:
AT DE FR GB NL

(30) Priority: 19.10.1999 JP 29610199

(43) Date of publication of application:
25.04.2001 Bulletin 2001/17

(73) Proprietors:
  • Heraeus Quarzglas GmbH & Co. KG
    63450 Hanau (DE)
  • SHIN-ETSU QUARTZ PRODUCTS CO., LTD.
    Shinjuku-ku, Tokyo 160-0023 (JP)

(72) Inventor:
  • Yamagata, Shigeru, Dr.
    Narashino-shi, Chiba-ken 275-0013 (JP)

(74) Representative: Staudt, Armin Walter et al
Patentanwalt Auf der Mauer 8
63674 Altenstadt
63674 Altenstadt (DE)


(56) References cited: : 
EP-A- 0 691 312
EP-A- 1 043 282
 EP-A- 0 835 848
US-A- 5 326 729
   
  • PATENT ABSTRACTS OF JAPAN vol. 1998, no. 1, 30 January 1998 (1998-01-30) -& JP 09 235134 A (SHIN-ETSU QUARTZ PRODUCTS CO LTD), 9 September 1997 (1997-09-09)
  • PATENT ABSTRACTS OF JAPAN vol. 2000, no. 2, 29 February 2000 (2000-02-29) & JP 11 302025 A (ASAHI GLASS CO LTD), 2 November 1999 (1999-11-02)
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).