(19)
(11) EP 1 094 366 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
02.11.2006 Bulletin 2006/44

(45) Mention of the grant of the patent:
20.09.2006 Bulletin 2006/38

(21) Application number: 00309198.0

(22) Date of filing: 19.10.2000
(51) International Patent Classification (IPC): 
G03F 7/20(2006.01)
 G03F 1/14(2006.01)

(54)

Method and system for optical proximity correction

Methode und System zur Korrektur von optischen Naheffekten (OPC)

Méthode et système pour corriger des effets de proximité optique

(84) Designated Contracting States:
DE FR GB IE IT NL

(30) Priority: 21.10.1999 US 422634

(43) Date of publication of application:
25.04.2001 Bulletin 2001/17

(73) Proprietors:
  • Infineon Technologies AG
    81669 München (DE)
  • International Business Machines Corporation
    Armonk, NY 10504 (US)

(72) Inventors:
  • Haffner, Henning
    Fishkill, NY 12524 (US)
  • Hoenigschmid, Heinz
    82319 Starnberg (DE)
  • Samuels, Donald J.
    Silverthorne, CO 80498-2129 (US)

(74) Representative: Vigars, Christopher Ian et al
HASELTINE LAKE, Redcliff Quay, 120 Redcliff Street
Bristol BS1 6HU
Bristol BS1 6HU (GB)


(56) References cited: : 
EP-A- 0 529 971
DE-A- 19 628 874
 EP-A- 0 822 452
US-A- 5 587 834
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).