(19)

(11)

EP 1 095 396 A2

(12)

(88) Date of publication A3: 08.02.2001 (43) Date of publication: 02.05.2001 Bulletin 2001/18 (21) Application number: 00918829.3 (22) Date of filing: 17.03.2000

(51) International Patent Classification (IPC)7: H01J 41/20 (86) International application number: PCT/EP0002/546 (87) International publication number: WO 0057/451 (28.09.2000 Gazette 2000/39)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 19.03.1999 US 125318 P (71) Applicant: FEI COMPANY Hillsboro, OR 97124-5830 (US)	(72) Inventor: MCGINN, James, B. NL-5656 AA Eindhoven (NL) (74) Representative: Bakker, Hendrik  INTERNATIONAAL OCTROOIBUREAU B.V.,Prof. Holstlaan 6 5656 AA Eindhoven 5656 AA Eindhoven (NL)