(19)

(11)

EP 1 100 981 A1

(12)

(43) Date of publication: 23.05.2001 Bulletin 2001/21 (21) Application number: 98907386.1 (22) Date of filing: 06.02.1998

(51) International Patent Classification (IPC)7: C23F 13/00 (86) International application number: PCT/US9802/308 (87) International publication number: WO 9918/261 (15.04.1999 Gazette 1999/15)

(84) Designated Contracting States: AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 02.10.1997 US 60666 P (71) Applicant: Fluor Daniel Inc. Irvine, CA 92698 (US)	(72) Inventor: REDDI, Satyanarayana Irvine, CA 92604 (US) (74) Representative: Viering, Jentschura & Partner  Postfach 22 14 43 80504 München 80504 München (DE)