WAFER GRIPPING FINGERS - Patent 1105257

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EP 1 105 257 A1

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(43)	Date of publication:
	13.06.2001 Bulletin 2001/24

(21)	Application number: 00916400.5

(22)	Date of filing: 16.03.2000

(51)	International Patent Classification (IPC)⁷: B25J 15/10

(86)	International application number:
	PCT/US0006/895

(87)	International publication number:
	WO 0054/941 (21.09.2000 Gazette 2000/38)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

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Priority:

16.03.1999 US 124647 P

(71)	Applicant: Ade Corporation
	Westwood, MA 02090-1806 (US)

(72)	Inventors:
	SINHA, Jaydeep, Kumar Norwood, MA 02062 (US) PODUJE, Noel, S. Needham, MA 02194 (US)

(74)	Representative: Thévenet, Jean-Bruno et al
	Cabinet Beau de Loménie158, rue de l'Université 75340 Paris Cédex 07 75340 Paris Cédex 07 (FR)

(54)	WAFER GRIPPING FINGERS