(19)
(11) EP 1 105 876 A1

(12)

(43) Date of publication:
13.06.2001 Bulletin 2001/24

(21) Application number: 98945762.7

(22) Date of filing: 21.08.1998
(51) International Patent Classification (IPC)7: G11C 7/00
(86) International application number:
PCT/US9817/298
(87) International publication number:
WO 0011/674 (02.03.2000 Gazette 2000/09)
(84) Designated Contracting States:
DE FR GB NL

(71) Applicant: CREDENCE SYSTEMS CORPORATION
Fremont, CA 94539 (US)

(72) Inventors:
  • LEPEJIAN,Y.D.,c/o Credence Systems Corp.,
    Fremont, California 94539 (US)
  • MARANDJIAN, Hrant
    Yerevan 75037 (AM)
  • GHUKASYAN, Hovhannes
    Yerevan 375014 (AM)
  • KRAUS, Lawrence
    San Jose, CA 95112 (US)

(74) Representative: Swindell & Pearson 
48 Friar Gate
Derby DE1 1GY
Derby DE1 1GY (GB)

   


(54) METHOD AND APPARATUS FOR BUILT-IN SELF TEST OF INTEGRATED CIRCUITS