(19)
(11) EP 1 106 826 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
02.05.2003 Bulletin 2003/18

(43) Date of publication A2:
13.06.2001 Bulletin 2001/24

(21) Application number: 00126636.0

(22) Date of filing: 04.12.2000
(51) International Patent Classification (IPC)7: F04B 13/00, F04B 43/02
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 02.12.1999 JP 343399
18.07.2000 JP 2000217926

(71) Applicant: EBARA CORPORATION
Ohta-ku, Tokyo (JP)

(72) Inventors:
  • Horie, Kuniaki
    Yamato-shi, Kanagawa-ken (JP)
  • Tsukamoto, Kiwamu
    Fujisawa-shi, Kanagawa-ken (JP)
  • Kamoda, Kenji
    Yokohama-shi, Kanagawa-ken (JP)
  • Yamagishi, Hirotake
    Yamato-shi, Kanagawa-ken (JP)
  • Uemura, Shinya
    Fujisawa-shi, Kanagawa-ken (JP)

(74) Representative: Geyer, Ulrich F., Dr. Dipl.-Phys. et al
WAGNER & GEYER, Patentanwälte, Gewürzmühlstrasse 5
80538 München
80538 München (DE)

   


(54) Flow rate control with a positive displacement liquid pump


(57) A positive displacement liquid-delivery apparatus comprising a positive displacement pump 10 and a differential pressure control unit 42. The positive displacement pump 10 includes a liquid-delivery chamber 28 having a housing 22 with one part formed of a flexible diaphragm 24; and a diaphragm driver 36 linked to the diaphragm 24 for deforming the same to discharge fluid from the liquid-delivery chamber 28. The differential pressure control unit 42 uniformly controls the differential pressure inside and outside the diaphragm 24 during the pumping process.






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