(19)
(11) EP 1 109 641 A1

(12)

(43) Date of publication:
27.06.2001 Bulletin 2001/26

(21) Application number: 99932548.3

(22) Date of filing: 21.07.1999
(51) International Patent Classification (IPC)7B22F 9/16, C23C 14/24, C23C 14/26
(86) International application number:
PCT/AU9900/588
(87) International publication number:
WO 0005/017 (03.02.2000 Gazette 2000/05)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 21.07.1998 AU PP624798

(71) Applicant: COMMONWEALTH SCIENTIFIC AND INDUSTRIAL RESEARCH ORGANISATION
Campbell,ACT 2612 (AU)

(72) Inventor:
  • HAIDAR, Jawad,Commonwealth Sci. & Ind. Res. Org.
    West Lindfield,Lindfield NSW 2070 (AU)

(74) Representative: Brown, John David 
FORRESTER & BOEHMERTFranz-Joseph-Strasse 38
80801 München
80801 München (DE)

   


(54) METHOD AND APPARATUS FOR PRODUCING MATERIAL VAPOUR